{"id":63159,"date":"2023-02-27T17:13:24","date_gmt":"2023-02-27T09:13:24","guid":{"rendered":"https:\/\/www.cnledw.com\/?p=63159"},"modified":"2023-03-23T09:29:53","modified_gmt":"2023-03-23T01:29:53","slug":"%e4%b8%ad%e5%9b%bd%e7%a7%91%e5%a4%a7%e7%a0%94%e5%88%b6%e5%87%ba%e6%b0%a7%e5%8c%96%e9%95%93%e5%9e%82%e7%9b%b4%e6%a7%bd%e6%a0%85%e5%9c%ba%e6%95%88%e5%ba%94%e6%99%b6%e4%bd%93%e7%ae%a1","status":"publish","type":"post","link":"https:\/\/www.cnledw.com\/GaN\/newsdetail-63159.html","title":{"rendered":"\u4e2d\u56fd\u79d1\u5927\u7814\u5236\u51fa\u6c27\u5316\u9553\u5782\u76f4\u69fd\u6805\u573a\u6548\u5e94\u6676\u4f53\u7ba1"},"content":{"rendered":"

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\u76f8\u5173\u7814\u7a76\u6210\u679c\u5206\u522b\u4ee5\u201cEnhancement-mode\u03b2-Ga2O3U-shaped gate trench vertical MOSFET realized by oxygen annealing\u201d\u548c\u201c702.3 A\u00b7cm-2\/10.4 m\u03a9\u00b7cm2Vertical \u03b2-Ga2O3U-Shape Trench Gate MOSFET with N-Ion Implantation\u201d\u4e3a\u9898\u5728\u7ebf\u53d1\u8868\u4e8eApplied Physics Letters\u3001IEEE Electron Device Letters\u671f\u520a\u3002<\/p>\n

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\"\"
<\/figcaption><\/figure>\n

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N\u79bb\u5b50\u6ce8\u5165MOSFET\u57fa\u4e8e\u5de5\u4e1a\u5316\u9ad8\u80fd\u79bb\u5b50\u6ce8\u5165\u8bbe\u5907\uff0c\u91c7\u7528N\u79bb\u5b50\u6ce8\u5165\u63ba\u6742\u5de5\u827a\uff0c\u5f53N\u6ce8\u5165\u6d53\u5ea6\u4e3a5\u00d71018cm-3\u65f6\uff0c\u5236\u5907\u7684\u5782\u76f4\u69fd\u6805MOSFET\u9608\u503c\u7535\u538b\u8fbe\u52304.2V\uff08@1A\/cm2\uff09\uff0c\u9971\u548c\u7535\u6d41\u5bc6\u5ea6\u9ad8\u8fbe702.3A\/cm2\uff0c\u5bfc\u901a\u7535\u963b10.4m\u03a9\u00b7cm2\u3002\u6b64\u5916\uff0c\u901a\u8fc7\u8c03\u8282N\u79bb\u5b50\u6ce8\u5165\u6d53\u5ea6\uff0c\u5668\u4ef6\u7684\u51fb\u7a7f\u7535\u538b\u53ef\u8fbe\u5230534V\uff0c\u4e3a\u76ee\u524d\u7535\u6d41\u963b\u6321\u5c42\u578b\u6c27\u5316\u9553MOSFET\u5668\u4ef6\u6700\u9ad8\u503c\uff0c\u529f\u7387\u54c1\u8d28\u56e0\u6570\u8d85\u8fc7\u4e86\u7845\u5355\u6781\u5668\u4ef6\u7684\u7406\u8bba\u6781\u9650\u3002\u4e24\u9879\u5de5\u4f5c\u4e3a\u6c27\u5316\u9553\u6676\u4f53\u7ba1\u627e\u5230\u4e86\u65b0\u7684\u6280\u672f\u8def\u7ebf\u548c\u7ed3\u6784\u65b9\u6848\u3002<\/p>\n

APL\u8bba\u6587\u94fe\u63a5\uff1a<\/p>\n

https:\/\/doi.org\/10.1063\/5.0130292<\/p>\n

IEEE EDL\u8bba\u6587\u94fe\u63a5\uff1a<\/p>\n

https:\/\/ieeexplore.ieee.org\/document\/10013743<\/p>\n

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