{"id":63658,"date":"2023-04-17T17:40:37","date_gmt":"2023-04-17T09:40:37","guid":{"rendered":"https:\/\/www.cnledw.com\/?p=63658"},"modified":"2023-04-17T17:19:09","modified_gmt":"2023-04-17T09:19:09","slug":"%e6%b0%a7%e5%8c%96%e9%95%93%e5%95%86%e4%b8%9a%e5%8c%96%ef%bc%8c%e8%bf%88%e5%87%ba%e9%87%8d%e8%a6%81%e4%b8%80%e6%ad%a5","status":"publish","type":"post","link":"https:\/\/www.cnledw.com\/GaN\/newsdetail-63658.html","title":{"rendered":"\u6c27\u5316\u9553\u5546\u4e1a\u5316\uff0c\u8fc8\u51fa\u91cd\u8981\u4e00\u6b65"},"content":{"rendered":"<p>\u65e5\u672c\u65b0\u80fd\u6e90\u4ea7\u4e1a\u6280\u672f\u7efc\u5408\u5f00\u53d1\u673a\u6784\uff08NEDO\uff094\u67086\u65e5\u5ba3\u5e03\uff0c\u4f5c\u4e3aNEDO\u63a8\u52a8\u7684\u201c\u6218\u7565\u8282\u80fd\u6280\u672f\u521b\u65b0\u8ba1\u5212\u201d\u7684\u4e00\u90e8\u5206\uff0cNovel Crystal Technology\u6b63\u5728\u81f4\u529b\u4e8e\u03b2-Ga2O3\u8096\u7279\u57fa\u52bf\u5792\u4e8c\u6781\u7ba1\u7684\u5546\u4e1a\u5316\u5f00\u53d1\u3002\u5ba3\u5e03\u5df2\u6210\u529f\u786e\u8ba4\u6c27\u5316\u9553 (\u03b2-Ga2O3) \u8096\u7279\u57fa\u52bf\u5792\u4e8c\u6781\u7ba1 (SBD)\u7684\u8fd0\u884c\u3002<\/p>\n<p>\u6c27\u5316\u9553\u6709\u671b\u6210\u4e3a\u8d85\u8d8aSiC\u548cGaN\u6027\u80fd\u7684\u6750\u6599\uff0c\u6709\u671b\u6210\u4e3a\u4e0b\u4e00\u4ee3\u529f\u7387\u534a\u5bfc\u4f53\uff0c\u65e5\u672c\u548c\u6d77\u5916\u6b63\u5728\u8fdb\u884c\u7814\u7a76\u548c\u5f00\u53d1\u3002\u5728\u8fd9\u79cd\u60c5\u51b5\u4e0b\uff0cNovel Crystal Technology\u5c06\u57283O2\u7684\u03b2-Ga2O3\u8096\u7279\u57fa\u52bf\u5792\u4e8c\u6781\u7ba1\u5546\u4e1a\u5316\u9879\u76ee\u4e0a\u81f4\u529b\u4e8e\u5546\u4e1a\u5316\u672c\u4ea7\u54c1\u7684\u5f00\u53d1\uff0c\u8fd9\u6b21\uff0c\u4ed6\u4eec\u51b3\u5b9a\u5c06\u6b63\u5728\u5f00\u53d1\u7684\u03b2-Ga2O3 SBD\u5b89\u88c5\u5728\u7535\u6d41\u8fde\u7eed\u578bPFC\uff08\u529f\u7387\u56e0\u6570\u6821\u6b63\uff09\u7535\u8def\u4e2d\uff0c\u5e76\u5bf9\u5176\u8fdb\u884c\u5b9e\u9645\u4f7f\u7528\u8bc4\u4f30\u3002<\/p>\n<figure class=\"alignnone no-info-img\"><img decoding=\"async\" loading=\"lazy\" class=\"aligncenter\" src=\"https:\/\/img.cnledw.com\/wp-content\/uploads\/2023\/04\/1-1.png\" alt=\"\" width=\"513\" height=\"177\" \/><figcaption style=\"display: none;\"><\/figcaption><\/figure>\n<p>\u5177\u4f53\u5730\uff0c\u5728350W\u8f93\u51fa\u7535\u6e90\u7684PFC\u7535\u8def\u4e2d\u5b89\u88c5\u4e86\u03b2-Ga2O3 SBD\uff0c\u8fdb\u884c\u4e86\u8fde\u7eed\u7535\u6d41\u5de5\u4f5c\u7684\u6f14\u793a\u6d4b\u8bd5\u3002\u7ed3\u679c\u53cd\u5411\u52a0\u4e86390V\u7684\u7535\u538b\uff0c\u6b64\u540e\uff0c\u5f53\u7535\u538b\u4ece\u53cd\u5411\u5207\u6362\u5230\u6b63\u5411\u65f6\uff0c\u7535\u6d41\u6d41\u8fc7\u4e8c\u6781\u7ba1\u6b63\u5411\u65f6\u7684\u7535\u6d41\u6ce2\u5f62\u5c31\u53d8\u6210\u4e86\u68af\u5f62\u6ce2\u6700\u59278A.\u636e\u8bf4\u7535\u6d41\u8fde\u7eed\u8fd0\u884c\u5f97\u5230\u786e\u8ba4\u3002\u5728\u6d4b\u8bd5\u4e2d\uff0c\u4ed6\u4eec \u8fd8\u68c0\u67e5\u4e86\u53cd\u5411\u6062\u590d\u7279\u6027\uff0c\u5e76\u5c06\u7535\u8def\u7684\u8f93\u51fa\u529f\u7387\u4e0e\u8f93\u5165\u529f\u7387\u4e4b\u6bd4\uff08\u529f\u7387\u8f6c\u6362\u6548\u7387\uff09\u4e0e\u5e7f\u6cdb\u7528\u4e8e\u76f8\u540c\u76ee\u7684\u7684\u7845\u5feb\u901f\u6062\u590d\u4e8c\u6781\u7ba1\uff08Si FRD\uff09\u8fdb\u884c\u4e86\u6bd4\u8f83\u3002\u7ecf\u8bc1\u5b9e\uff0c\u4e0e Si FRD \u76f8\u6bd4\uff0c\u03b2-Ga2O3 SBD \u7684\u6548\u7387\u63d0\u9ad8\u4e86 1%\u3002<\/p>\n<figure class=\"alignnone no-info-img\"><img decoding=\"async\" loading=\"lazy\" class=\"aligncenter\" src=\"https:\/\/img.cnledw.com\/wp-content\/uploads\/2023\/04\/2-2.png\" alt=\"\" width=\"505\" height=\"163\" \/><figcaption style=\"display: none;\"><\/figcaption><\/figure>\n<p>Novel Crystal Technology\u6b63\u5728\u7740\u624b\u5efa\u7acb\u65b0\u5f00\u53d1\u7684\u8be5\u516c\u53f8\u8fd8\u8ba1\u5212\u5f00\u53d1\u03b2-Ga2O3 SBD \u3002\u6b64\u5916\uff0c\u5c06\u5229\u7528\u8be5\u5f00\u53d1\u6210\u679c\u8fdb\u884c\u53cd\u578bMOS\u6676\u4f53\u7ba1\u7684\u7814\u7a76\u548c\u5f00\u53d1\u3002<\/p>\n<p><strong>\u6210\u529f\u91cf\u4ea74\u540b\u6c27\u5316\u9553\u6676\u5706<\/strong><\/p>\n<p>\u57282021\u5e74\uff0c\u65e5\u672c\u534a\u5bfc\u4f53\u4f01\u4e1aNovel Crystal Technology\u6210\u529f\u91cf\u4ea74\u540b\u6c27\u5316\u9553\u6676\u5706\uff0c\u5e76\u4e8e\u4eca\u5e74\u5f00\u59cb\u4f9b\u5e94\u5ba2\u6237\u6676\u5706\uff0c\u4f7f\u5f97\u65e5\u672c\u5728\u7b2c\u4e09\u4ee3\u5316\u5408\u7269\u534a\u5bfc\u4f53\u7ade\u8d5b\u4e2d\u518d\u5ea6\u62d4\u5f97\u5934\u7b79\u3002\u8be5\u62a5\u5bfc\u6307\u51fa\uff0c\u8be5\u516c\u53f8\u6210\u529f\u91cf\u4ea7\u65b0\u4e00\u4ee3\u529f\u7387\u534a\u5bfc\u4f53\u6750\u6599\u6c27\u5316\u9553\u5236\u6210\u76844\u540b\u6676\u5706\uff0c\u6210\u4e3a\u5168\u7403\u9996\u5bb6\u5b8c\u6210\u91cf\u4ea7\u4f01\u4e1a\uff0c\u800c\u4e14\u8be5\u6676\u5706\u53ef\u4ee5\u4f7f\u7528\u539f\u67094\u540b\u6676\u5706\u8bbe\u5907\u5236\u9020\u751f\u4ea7\uff0c\u6709\u6548\u8fd0\u7528\u8fc7\u53bb\u6295\u8d44\u7684\u8001\u8bbe\u5907\uff0c\u5bf9\u4e8e\u4f01\u4e1a\u8d44\u672c\u652f\u51fa\u66f4\u6709\u6548\u7387\uff0c\u9884\u8ba12021\u5e74\u5185\u5f00\u59cb\u4f9b\u5e94\u6676\u5706\u3002\u6b64\u5916\uff0cNovel Crystal Technology\u8fd8\u8ba1\u753b\u57282023\u5e74\u4f9b\u5e946\u540b\u6676\u5706\uff0c\u5c4a\u65f6\u53c8\u5c06\u662f\u5212\u65f6\u4ee3\u7a81\u7834\u3002<\/p>\n<p>Novel Crystal Technology\u80cc\u666f\u6765\u5934\u4e0d\u5c0f\uff0c\u7531\u65e5\u672c\u7535\u5b50\u96f6\u90e8\u4ef6\u4f01\u4e1a\u7530\u6751\u5236\u4f5c\u6240\u548cAGC\u7b49\u51fa\u8d44\u6210\u7acb\uff0c2017\u5e74\u4e0e\u7530\u6751\u5236\u4f5c\u6240\u5408\u4f5c\u6210\u529f\u5f00\u53d1\u51fa\u5168\u7403\u9996\u521b\u6c27\u5316\u9553MOS\u578b\u529f\u7387\u7535\u6676\u4f53\uff0c\u5927\u5e45\u964d\u4f4e\u529f\u8017\uff0c\u4ec5\u4e3a\u4f20\u7edfMOSFET\u5343\u5206\u4e4b\u4e00\uff1b2019\u5e74\u66f4\u5f00\u53d1\u51fa2\u540b\u03b2\u578b\u6c27\u5316\u9553\u6676\u5706\uff0c\u4e0d\u8fc7\uff0c\u7531\u4e8e\u5236\u9020\u6210\u672c\u9ad8\u6602\uff0c\u672a\u80fd\u88ab\u5e7f\u6cdb\u5e94\u7528\uff0c\u4ec5\u9650\u4e8e\u5b9e\u9a8c\u5ba4\u7814\u53d1\u3002<\/p>\n<p>\u5728\u5bbd\u80fd\u9699\u534a\u5bfc\u4f53\u6750\u6599\u4e2d\uff0c\u6c27\u5316\u9553\u5177\u5907\u8bb8\u591a\u4f18\u5f02\u7279\u6027\uff0c\u5982\uff1a\u7535\u5b50\u98d8\u79fb\u9971\u548c\u901f\u5ea6\u5feb\u3001\u4ecb\u7535\u5e38\u6570\u5c0f\u3001\u6781\u9ad8\u5d29\u6e83\u7535\u538b\u3001\u70ed\u7a33\u5b9a\u6027\u597d\u4e14\u8010\u9ad8\u6e29\uff0c\u56e0\u6b64\uff0c\u9010\u6e10\u6210\u4e3a\u4e0b\u4e00\u4e16\u4ee3\u91cd\u8981\u3001\u4e14\u6700\u5177\u6f5c\u529b\u5bbd\u80fd\u9699\u534a\u5bfc\u4f53\u7cfb\u5217\u6750\u6599\uff0c\u6676\u5706\u4ef7\u683c\u6bd4\u78b3\u5316\u77fd\u7845\u6676\u5706\u4f4e\uff0c\u800c\u4e14\u53ef\u4ee5\u66f4\u52a0\u9ad8\u6548\u5730\u63a7\u5236\u7535\u529b\uff0c\u672a\u6765\u4e00\u65e6\u4ef7\u683c\u6765\u5230\u751c\u871c\u70b9\uff0c\u53ef\u5e7f\u6cdb\u5e94\u7528\u4e8e\u7535\u52a8\u8f66\u53ca\u592a\u9633\u80fd\u7cfb\u7edf\uff0c\u5927\u5e45\u63d0\u5347\u80fd\u6e90\u6548\u7387\u3002<\/p>\n<p>\u5230\u4e86\u53bb\u5e74\uff0c\u636e\u65e5\u672c\u5a92\u4f53\u62a5\u9053\uff0cNovel Crystal Technology\u8ba1\u5212\u6295\u8d44\u7ea6\u4e3a20\u4ebf\u65e5\u5143\uff0c\u5411\u5176\u516c\u53f8\u5de5\u5382\u6dfb\u52a0\u8bbe\u5907\uff0c\u5230 2025 \u5e74\uff0c\u5efa\u6210\u5e74\u4ea7 20,000 \u7247 100mm\uff084 \u82f1\u5bf8\uff09\u6c27\u5316\u9553 (Ga2O3) \u6676\u5706\u751f\u4ea7\u7ebf\u3002<\/p>\n<p>\u9664\u4e86\u5236\u9020\u548c\u52a0\u5de5\u6c27\u5316\u9553\u5355\u6676\u57fa\u677f\u7684\u8bbe\u5907\u548c\u68c0\u67e5\u8bbe\u5907\u5916\uff0cNovel Crystal Technology\u8fd8\u5c06\u5f15\u8fdb\u7528\u4e8e\u5728\u6676\u5706\u4e0a\u5916\u5ef6\u751f\u957f\u6c27\u5316\u9553\u7684\u6210\u819c\u8bbe\u5907\uff0c\u5e76\u8ba1\u5212\u5f00\u53d1\u4e00\u79cd\u53ef\u4ee5\u540c\u65f6\u6c89\u79ef\u591a\u4e2a\u6676\u5706\u7684\u65b0\u8bbe\u5907\u3002<\/p>\n<p>\u4e0e\u7531\u7845\u5236\u6210\u7684\u4f20\u7edf\u534a\u5bfc\u4f53\u76f8\u6bd4\uff0c\u6c27\u5316\u9553\u534a\u5bfc\u4f53\u53ef\u4ee5\u5b9e\u73b0\u5668\u4ef6\u7684\u529f\u8017\u964d\u4f4e\u548c\u9ad8\u8010\u538b\u3002\u5176\u7279\u70b9\u662f\u80fd\u591f\u901a\u8fc7\u7194\u878d\u6cd5\u751f\u957f\u5757\u72b6\u5355\u6676\u5e76\u6709\u6548\u5730\u5236\u9020\u6676\u4f53\u57fa\u677f\u3002\u4e0e\u6b63\u5728\u6295\u5165\u5b9e\u9645\u5e94\u7528\u7684\u78b3\u5316\u7845\uff08SiC\uff09\u7b49\u4e0b\u4e00\u4ee3\u6750\u6599\u76f8\u6bd4\uff0c\u6676\u4f53\u751f\u957f\u901f\u5ea6\u5feb\u4e86\u7ea6100\u500d\uff0c\u57fa\u677f\u66f4\u5bb9\u6613\u5236\u9020\uff0c\u4ece\u800c\u663e\u8457\u964d\u4f4e\u4e86\u6210\u672c\u3002<\/p>\n<p><strong>\u6210\u529f\u5f00\u53d1\u51fa\u9ad8\u8d28\u91cf\u7b2c3\u4ee3\u6c27\u5316\u9553<\/strong><\/p>\n<p>\u53bb\u5e74\u56db\u6708\uff0c\u65e5\u672c\u534a\u5bfc\u4f53\u4f01\u4e1aNovel Crystal Technology\u53d1\u8868\u4e0e\u4f50\u8d3a\u5927\u5b66\u5171\u540c\u5f00\u53d1\u4e86\u4e00\u9879\u76f8\u8f83\u4e8e\u65e2\u6709\u5236\u54c1\uff0c\u81f4\u547d\u7f3a\u9677\u51cf\u5c11\u81f310\u5206\u4e4b1\u4e4b\u7b2c3\u4ee3\u6c27\u5316\u9553100 mm\u78ca\u6676\u6676\u5706(Epitaxial Wafer)\u3002<\/p>\n<p>\u62e5\u6709\u6bd4GaN\u3001SiC\u66f4\u5927\u80fd\u9699(Bandgap)\u7684\u6c27\u5316\u9553(\u03b2-Ga2O3)\u53ef\u671b\u6210\u4e3a\u6b21\u4e16\u4ee3\u529f\u7387\u534a\u5bfc\u4f53\u6750\u6599\u3002\u76ee\u524dNovell Crystal Technology\u5df2\u7ecf\u5f00\u53d1\u51fa\u80fd\u591f\u5f62\u6210100 mm\u4e4b\u6c27\u5316\u9553\u78ca\u6676\u6676\u5706\u7684\u6210\u819c\u88c5\u7f6e\uff0c\u5e76\u5c55\u5f00\u4e86\u7b2c\u4e8c\u4ee3\u6c27\u5316\u9553100 mm\u78ca\u6676\u6676\u5706\u7684\u5236\u9020\u4e0e\u9500\u552e\u3002\u4f46\u7531\u4e8e\u4fc3\u4f7f\u5143\u4ef6\u8010\u538b\u7279\u6027\u52a3\u5316\u7684\u81f4\u547d\u7f3a\u9677\u5927\u7ea6\u670910\u4e2a\/cm2\uff0c\u56e0\u6b64\u65e0\u6cd5\u5236\u4f5c\u5927\u578b\u5143\u4ef6\uff0c\u7535\u6d41\u503c\u9650\u5236\u572810A\u5de6\u53f3\u3002<\/p>\n<p>\u6b64\u6b21\u5219\u8fdb\u4e00\u6b65\u8c03\u67e5\u81f4\u547d\u7f3a\u9677\u7684\u539f\u56e0\uff0c\u7740\u624b\u5c55\u5f00\u6676\u5706\u9ad8\u8d28\u91cf\u5316\u7684\u7814\u7a76\u3002\u7ed3\u679c\u663e\u793a\uff0c\u9020\u6210\u81f4\u547d\u7f3a\u9677\u7684\u539f\u56e0\u4e3b\u8981\u662f\u5728\u78ca\u6676\u6210\u819c\u8fc7\u7a0b\u4e2d\u4ea7\u751f\u7684\u7279\u5b9a\u7c89\u672b\u3002\u7814\u7a76\u56e2\u961f\u900f\u8fc7\u6539\u5584\u78ca\u6676\u6210\u819c\u6761\u4ef6\uff0c\u6210\u529f\u5730\u5c06100 mm\u78ca\u6676\u6676\u5706\u7684\u81f4\u547d\u7f3a\u9677\u964d\u4f4e\u81f310\u5206\u4e4b1\uff0c\u51cf\u5c11\u52300.7\u4e2a\/cm2\u3002<\/p>\n<p>\u7814\u7a76\u56e2\u961f\u4e5f\u5b9e\u9645\u8fdb\u884c\u4e86\u78ca\u6676\u6676\u5706\u7684\u819c\u539a\u5206\u5e03\u4e0e\u65bd\u4f53\u6d53\u5ea6(Donor Concentration)\u7684\u6d4b\u91cf\uff0c\u786e\u8ba4\u819c\u539a\u5206\u5e03\u7ea6\u4e3a10 \u03bcm \u00b1 5%\u3001\u65bd\u4f53\u6d53\u5ea6\u5219\u662f1\u00d71016 cm-3 \u00b1 7%\u5de6\u53f3\uff0c\u8fbe\u5230\u5e94\u7528\u4e8e\u529f\u7387\u5143\u4ef6\u4e5f\u4e0d\u4f1a\u9020\u6210\u95ee\u9898\u7684\u6c34\u5e73\u3002\u53e6\u5916\u8bd5\u4f5c\u4e8610\u00d710 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