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class=\"alignnone no-info-img\"><img decoding=\"async\" loading=\"lazy\" class=\"aligncenter\" src=\"https:\/\/img.cnledw.com\/wp-content\/uploads\/2023\/04\/2-3.png\" alt=\"\" width=\"506\" height=\"260\" \/><figcaption style=\"display: none;\"><\/figcaption><\/figure>\n<p>\u4f7f\u7528\u5012\u88c5\u82af\u7247\u65b9\u6cd5\u7684\u9ad8\u7cbe\u5ea6\u7248\u672c\u5c06\u6fc0\u5149\u82af\u7247\u8fde\u63a5\u5230\u7845\u5149\u5b50\u82af\u7247\u4e0a\u3002<\/p>\n<p><strong>\u5fae\u8f6c\u5370<\/strong><\/p>\n<p>\u5fae\u8f6c\u79fb\u5370\u5237\u6d88\u9664\u4e86\u5bf9\u63a5\u8026\u5408\u7684\u4e00\u4e9b\u5bf9\u9f50\u56f0\u96be\uff0c\u540c\u65f6\u8fd8\u52a0\u5feb\u4e86\u7ec4\u88c5\u8fc7\u7a0b\u3002\u4e0e\u5012\u88c5\u82af\u7247\u5de5\u827a\u4e00\u6837\uff0c\u53d1\u5149\u5668\u4ef6\u751f\u957f\u5728 III-V \u65cf\u534a\u5bfc\u4f53\u57fa\u677f\u4e0a\u3002\u4f46\u6709\u4e00\u4e2a\u5f88\u5927\u7684\u4e0d\u540c\uff1aIII-V 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\u6beb\u7c73\u7684\u7845\u6676\u5706\u7684\u5de5\u5177\u6765\u5904\u7406 III-V \u65cf\u5de5\u827a\u6b65\u9aa4\u6beb\u7c73\u76f4\u5f84\u3002\u8fd9\u79cd\u5de5\u5177\u4e0e\u6fc0\u5149\u4e8c\u6781\u7ba1\u94f8\u9020\u5382\u4e2d\u4f7f\u7528\u7684\u5de5\u5177\u975e\u5e38\u4e0d\u540c\uff0c\u540e\u8005\u7684\u5178\u578b\u6676\u5706\u76f4\u5f84\u8981\u5c0f\u5f97\u591a\u3002<\/p>\n<p>\u56fe\u7247\u5728\u82af\u7247\u5230\u6676\u5706\u952e\u5408\u4e2d\uff0cIII-V \u65cf\u534a\u5bfc\u4f53 [\u7c89\u7ea2\u8272] \u7684\u7a7a\u767d\u7247\u88ab\u952e\u5408\u5230\u5df2\u7ecf\u5904\u7406\u8fc7\u7684\u7845\u5149\u5b50\u6676\u5706\u4e0a\u3002III-V \u65cf\u6750\u6599\u5728\u7845\u6ce2\u5bfc\u4e0a\u65b9\u52a0\u5de5\u6210\u6fc0\u5149\u5668\u3002\u7136\u540e\u8680\u523b\u6389\u5176\u4f59\u7684 III-V 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\u6750\u6599\u3002\u6839\u672c\u95ee\u9898\u5728\u4e8e\uff0c\u7845\u4e2d\u539f\u5b50\u7684\u6676\u683c\u95f4\u8ddd\u4e0e\u611f\u5174\u8da3\u7684 III-V \u65cf\u534a\u5bfc\u4f53\u4e2d\u539f\u5b50\u7684\u6676\u683c\u95f4\u8ddd\u4e4b\u95f4\u5b58\u5728\u76f8\u5f53\u5927\u7684\u4e0d\u5339\u914d\u2014\u2014\u8d85\u8fc7 4%\u3002<\/p>\n<p>\u7531\u4e8e\u8fd9\u79cd\u6676\u683c\u5931\u914d\uff0c\u5728\u7845\u4e0a\u751f\u957f\u7684\u6bcf\u4e2a III-V \u5c42\u90fd\u4f1a\u4ea7\u751f\u5e94\u53d8\u3002\u4ec5\u6dfb\u52a0\u51e0\u7eb3\u7c73\u7684 III-V \u8584\u819c\u540e\uff0c\u6676\u4f53\u4e2d\u5c31\u4f1a\u51fa\u73b0\u7f3a\u9677\uff0c\u4ece\u800c\u91ca\u653e\u7d2f\u79ef\u7684\u5e94\u53d8\u3002\u8fd9\u4e9b\u201c\u5931\u914d\u201d\u7f3a\u9677\u6cbf\u7740\u7a7f\u900f\u6574\u4e2a III-V \u5c42\u7684\u7ebf\u5f62\u6210\u3002\u8fd9\u4e9b\u7f3a\u9677\u5305\u62ec\u5f00\u8def\u6676\u4f53\u952e\u7ebf\u548c\u5c40\u90e8\u6676\u4f53\u7578\u53d8\uff0c\u8fd9\u4e24\u8005\u90fd\u4f1a\u4e25\u91cd\u964d\u4f4e\u5149\u7535\u5668\u4ef6\u7684\u6027\u80fd\u3002<\/p>\n<p>\u4e3a\u9632\u6b62\u8fd9\u4e9b\u7f3a\u9677\u7834\u574f\u6fc0\u5149\u5668\uff0c\u5fc5\u987b\u5c06\u5b83\u4eec\u9650\u5236\u5728\u8fdc\u79bb\u8bbe\u5907\u7684\u5730\u65b9\u3002\u8fd9\u6837\u505a\u901a\u5e38\u6d89\u53ca\u94fa\u8bbe\u4e00\u5c42\u51e0\u5fae\u7c73\u539a\u7684 III-V \u6750\u6599\uff0c\u5728\u4e0b\u9762\u7684\u5931\u914d\u7f3a\u9677\u548c\u4e0a\u9762\u7684\u65e0\u5e94\u53d8\u533a\u57df\u4e4b\u95f4\u5f62\u6210\u4e00\u4e2a\u5de8\u5927\u7684\u7f13\u51b2\u533a\uff0c\u6fc0\u5149\u8bbe\u5907\u53ef\u4ee5\u5728\u90a3\u91cc\u5236\u9020\u3002\u52a0\u5229\u798f\u5c3c\u4e9a\u5927\u5b66\u5723\u5854\u82ad\u82ad\u62c9\u5206\u6821\u7684\u7814\u7a76\u4eba\u5458\u62a5\u544a\u4e86\u4f7f\u7528\u8fd9\u79cd\u65b9\u6cd5\u53d6\u5f97\u7684\u51fa\u8272\u8fdb\u5c55\uff0c\u5c55\u793a\u4e86\u5177\u6709\u53ef\u9760\u5bff\u547d\u7684\u9ad8\u6548\u7837\u5316\u9553\u57fa\u91cf\u5b50\u70b9\u6fc0\u5149\u5668\u3002<\/p>\n<p>\u7136\u800c\uff0c\u8fd9\u4e9b\u5b9e\u9a8c\u53ea\u662f\u5728\u5c0f\u89c4\u6a21\u4e0a\u8fdb\u884c\u7684\u3002\u5c06\u8be5\u6280\u672f\u6269\u5c55\u5230\u5de5\u4e1a\u4e2d\u4f7f\u7528\u7684 200 \u6216 300 \u6beb\u7c73\u6676\u5706\u5c06\u5f88\u56f0\u96be\u3002\u6dfb\u52a0\u539a\u7f13\u51b2\u5c42\u53ef\u80fd\u4f1a\u5bfc\u81f4\u5404\u79cd\u673a\u68b0\u95ee\u9898\uff0c\u4f8b\u5982 III-V \u8584\u819c\u5185\u90e8\u51fa\u73b0\u88c2\u7eb9\u6216\u6676\u5706\u5f2f\u66f2\u3002\u6b64\u5916\uff0c\u7531\u4e8e\u6709\u6e90\u5668\u4ef6\u4f4d\u4e8e\u5982\u6b64\u539a\u7684\u7f13\u51b2\u5c42\u4e4b\u4e0a\uff0c\u56e0\u6b64\u5f88\u96be\u5c06\u5149\u8026\u5408\u5230\u7845\u57fa\u677f\u4e2d\u7684\u4e0b\u65b9\u6ce2\u5bfc\u3002<\/p>\n<p>\u4e3a\u4e86\u89c4\u907f\u8fd9\u4e9b\u6311\u6218\uff0cImec \u5f15\u5165\u4e86\u4e00\u79cd\u79f0\u4e3a\u7eb3\u7c73\u810a\u5de5\u7a0b\u6216 NRE \u7684\u5355\u7247\u96c6\u6210\u65b0\u65b9\u6cd5\u3002\u8be5\u6280\u672f\u65e8\u5728\u8feb\u4f7f\u7f3a\u9677\u5728\u5982\u6b64\u6709\u9650\u7684\u7a7a\u95f4\u4e2d\u5f62\u6210\uff0c\u4ee5\u4fbf\u53ef\u4ee5\u5728\u4e0e\u5e95\u5c42\u7845\u7684\u754c\u9762\u4e0a\u65b9\u7565\u9ad8\u4e8e 100 nm \u5904\u6784\u5efa\u5de5\u4f5c\u8bbe\u5907\u3002<\/p>\n<p>NRE \u4f7f\u7528\u4e00\u79cd\u79f0\u4e3a\u7eb5\u6a2a\u6bd4\u9677\u5370\u7684\u73b0\u8c61\u5c06\u7f3a\u9677\u9650\u5236\u5728\u5c0f\u533a\u57df\u3002\u5b83\u9996\u5148\u5728\u4e8c\u6c27\u5316\u7845\u7edd\u7f18\u4f53\u5c42\u5185\u5f62\u6210\u53c8\u7a84\u53c8\u6df1\u7684\u6c9f\u69fd\u3002\u5728\u6c9f\u69fd\u5e95\u90e8\uff0c\u4e5f\u5c31\u662f\u7edd\u7f18\u4f53\u4e0e\u7845\u63a5\u89e6\u7684\u5730\u65b9\uff0c\u4e00\u6761\u51f9\u69fd\u5207\u5165\u7845\u4e2d\uff0c\u4f7f\u7a7a\u9699\u7684\u6a2a\u622a\u9762\u5448\u7bad\u5934\u5f62\u3002\u7136\u540e\u5728\u6c9f\u69fd\u5185\u751f\u957f\u4e00\u5c42\u8584\u8584\u7684 III-V \u65cf\u6676\u4f53\uff0c\u5e94\u53d8\u5f15\u8d77\u7684\u5931\u914d\u7f3a\u9677\u88ab\u6709\u6548\u5730\u6355\u83b7\u5728\u6c9f\u69fd\u4fa7\u58c1\uff0c\u9632\u6b62\u8fd9\u4e9b\u7f3a\u9677\u7ebf\u7a7f\u900f\u5f97\u66f4\u8fdc\u3002\u586b\u5145\u6c9f\u69fd\u540e\uff0c\u7ee7\u7eed\u751f\u957f\u4ee5\u5728\u6c9f\u69fd\u4e0a\u65b9\u5f62\u6210\u66f4\u5927\u7684 III-V \u65cf\u6750\u6599\u7eb3\u7c73\u810a\u3002\u8be5\u7eb3\u7c73\u7ea7\u810a\u4e2d\u7684\u6750\u6599\u5b8c\u5168\u6ca1\u6709\u7f3a\u9677\uff0c\u56e0\u6b64\u53ef\u7528\u4e8e\u6fc0\u5149\u8bbe\u5907\u3002<\/p>\n<p>\u5927\u591a\u6570\u5173\u4e8e\u5355\u7247\u96c6\u6210\u7684\u7814\u7a76\u90fd\u662f\u5728\u6539\u8fdb\u5355\u4e2a\u8bbe\u5907\u548c\u786e\u5b9a\u5176\u6545\u969c\u539f\u56e0\u7684\u5c42\u9762\u4e0a\u8fdb\u884c\u7684\u3002\u4f46 Imec \u5df2\u7ecf\u5728\u5c55\u793a\u4e0e\u8be5\u6280\u672f\u7684\u5b8c\u6574\u6676\u5706\u7ea7\u96c6\u6210\u65b9\u9762\u53d6\u5f97\u4e86\u5b9e\u8d28\u6027\u8fdb\u5c55\uff0c\u5728 300 \u6beb\u7c73\u7845\u8bd5\u4ea7\u7ebf\u4e0a\u751f\u4ea7\u4e86\u9ad8\u8d28\u91cf\u7684\u57fa\u4e8e GaAs \u7684\u5149\u7535\u4e8c\u6781\u7ba1\u3002\u4e0b\u4e00\u4e2a\u91cc\u7a0b\u7891\u5c06\u662f\u57fa\u4e8e\u4e0e\u5149\u7535\u4e8c\u6781\u7ba1\u7c7b\u4f3c\u8bbe\u8ba1\u7684\u7535\u6cf5\u6d66\u6fc0\u5149\u5668\u7684\u6f14\u793a\u3002Nanoridge \u5de5\u7a0b\u4ecd\u5728\u5b9e\u9a8c\u5ba4\u4e2d\u8fdb\u884c\u5f00\u53d1\uff0c\u4f46\u5982\u679c\u6210\u529f\uff0c\u65e0\u7591\u5c06\u5bf9\u8fd9\u4e2a\u884c\u4e1a\u4ea7\u751f\u5de8\u5927\u5f71\u54cd\u3002<\/p>\n<figure class=\"alignnone no-info-img\"><img decoding=\"async\" loading=\"lazy\" class=\"aligncenter\" src=\"https:\/\/img.cnledw.com\/wp-content\/uploads\/2023\/04\/4-1.png\" alt=\"\" width=\"514\" height=\"303\" \/><figcaption style=\"display: none;\"><\/figcaption><\/figure>\n<p>Nanoridge engineering \u5728\u7845\u4e2d\u7279\u6b8a\u5f62\u72b6\u7684\u6c9f\u69fd\u4e2d\u751f\u957f\u9002\u7528\u4e8e\u6fc0\u5149\u7684\u534a\u5bfc\u4f53\u3002\u6c9f\u69fd\u7684\u5f62\u72b6\u5c06\u7f3a\u9677 [\u63d2\u56fe] \u7f6e\u4e8e\u6fc0\u5149\u5668\u6784\u9020\u533a\u57df\u7684\u4e0b\u65b9\u3002<\/p>\n<figure class=\"alignnone no-info-img\"><img decoding=\"async\" loading=\"lazy\" class=\"aligncenter\" src=\"https:\/\/img.cnledw.com\/wp-content\/uploads\/2023\/04\/5.png\" alt=\"\" width=\"481\" height=\"361\" \/><figcaption style=\"display: none;\"><\/figcaption><\/figure>\n<p><strong>\u7845\u6fc0\u5149\u5668\u7684\u524d\u666f<\/strong><\/p>\n<p>\u5728\u63a5\u4e0b\u6765\u7684\u51e0\u5e74\u91cc\uff0c\u8fd9\u91cc\u8ba8\u8bba\u7684\u6bcf\u4e00\u79cd\u65b9\u6cd5\u90fd\u80af\u5b9a\u4f1a\u53d6\u5f97\u8fdb\u4e00\u6b65\u8fdb\u5c55\u3002\u6211\u4eec\u9884\u8ba1\u5b83\u4eec\u6700\u7ec8\u5c06\u5171\u5b58\u4ee5\u6ee1\u8db3\u4e0d\u540c\u7684\u5e94\u7528\u7a0b\u5e8f\u9700\u6c42\u548c\u7528\u4f8b\u3002<\/p>\n<p>\u76f8\u5bf9\u9002\u4e2d\u7684\u5b89\u88c5\u6210\u672c\u548c\u5012\u88c5\u82af\u7247\u6fc0\u5149\u5668\u7ec4\u4ef6\u7684\u51c6\u5907\u5c31\u7eea\u5c06\u4f7f\u8fd1\u671f\u4ea7\u54c1\u6210\u4e3a\u53ef\u80fd\uff0c\u5e76\u4e14\u5bf9\u4e8e\u6bcf\u4e2a\u5149\u5b50 IC \u53ea\u9700\u8981\u4e00\u4e2a\u6216\u51e0\u4e2a\u6fc0\u5149\u5668\u7684\u5e94\u7528\u7279\u522b\u6709\u5438\u5f15\u529b\uff0c\u4f8b\u5982\u6570\u636e\u4e2d\u5fc3\u4f7f\u7528\u7684\u5149\u6536\u53d1\u5668\u3002\u6b64\u5916\uff0c\u8fd9\u79cd\u65b9\u6cd5\u56fa\u6709\u7684\u7075\u6d3b\u6027\u4f7f\u5176\u5bf9\u9700\u8981\u975e\u6807\u51c6\u6fc0\u5149\u6ce2\u957f\u6216\u4e0d\u5e38\u89c1\u7684\u5149\u5b50\u6280\u672f\u7684\u5e94\u7528\u5177\u6709\u5438\u5f15\u529b\u3002<\/p>\n<p>\u5bf9\u4e8e\u6bcf\u4e2a\u5149\u5b50 IC \u9700\u8981\u591a\u4e2a\u6fc0\u5149\u5668\u6216\u653e\u5927\u5668\u7684\u5927\u6279\u91cf\u5e94\u7528\uff0c\u8f6c\u79fb\u5370\u5237\u548c\u82af\u7247\u5230\u6676\u5706\u952e\u5408\u63d0\u4f9b\u66f4\u9ad8\u7684\u5236\u9020\u541e\u5410\u91cf\u3001\u66f4\u5c0f\u7684\u8026\u5408\u635f\u8017\uff0c\u5e76\u6709\u53ef\u80fd\u8fdb\u4e00\u6b65\u964d\u4f4e\u6210\u672c\u3002\u56e0\u4e3a\u8fd9\u91cc\u7684\u8bbe\u7f6e\u6210\u672c\u8981\u9ad8\u5f97\u591a\uff0c\u6240\u4ee5\u9002\u5408\u8fd9\u4e9b\u6280\u672f\u7684\u5e94\u7528\u7a0b\u5e8f\u5fc5\u987b\u6709\u5f88\u5927\u7684\u5e02\u573a\u3002<\/p>\n<p>\u6700\u540e\uff0c\u7845\u4e0a\u7684\u76f4\u63a5 III-V \u65cf\u5916\u5ef6\uff0c\u4f8b\u5982 NRE 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