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\"\"
<\/figcaption><\/figure>\n

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\"\"
<\/figcaption><\/figure>\n

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\"\"
<\/figcaption><\/figure>\n

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\"\"
<\/figcaption><\/figure>\n
<\/figcaption><\/figure>\n

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Wolfspeed<\/strong><\/p>\n

\u5728\u6c7d\u8f66\u7535\u6c14\u5316\u3001\u53ef\u518d\u751f\u80fd\u6e90\u53d1\u5c55\u53ca\u6570\u5b57\u5316\u5927\u6f6e\u4e0b\uff0c\u65b0\u80fd\u6e90\u6c7d\u8f66\u3001\u5de5\u4e1a\u3001\u8f68\u9053\u4ea4\u901a\u53ca\u901a\u8baf\u57fa\u7ad9\u7b49\u9ad8\u538b\u9ad8\u529f\u7387\u5e94\u7528\u5bf9\u529f\u7387\u534a\u5bfc\u4f53\u5668\u4ef6\u63d0\u51fa\u4e86\u66f4\u9ad8\u7684\u8981\u6c42\uff0c\u800c\u4f20\u7edf\u7845\u57fa\u529f\u7387\u534a\u5bfc\u4f53\u5668\u4ef6\u7684\u7535\u80fd\u53d8\u6362\u6548\u7387\u5df2\u7ecf\u8fbe\u5230\u7406\u8bba\u6781\u9650\uff0c\u56e0\u6b64\uff0cSiC\u7b49\u7b2c\u4e09\u4ee3\u534a\u5bfc\u4f53\u6750\u6599\u7684\u5e94\u7528\u6f5c\u529b\u9010\u6e10\u88ab\u6316\u6398\u3002<\/p>\n

\u76f8\u6bd4\u7845\u57fa\u529f\u7387\u534a\u5bfc\u4f53\uff0cSiC\u529f\u7387\u5668\u4ef6\u80fd\u591f\u5b9e\u73b0\u66f4\u4f4e\u7684\u5bfc\u901a\u635f\u8017\u548c\u5f00\u5173\u635f\u8017\uff0c\u8f6c\u6362\u6548\u7387\u66f4\u9ad8\uff0c\u6709\u5229\u4e8e\u5149\u4f0f\u9006\u53d8\u5668\u3001\u670d\u52a1\u5668\u7535\u6e90\u3001\u6c7d\u8f66\u5145\u7535\u6869\u7b49\u63d0\u5347\u7cfb\u7edf\u6548\u7387\uff0c\u51cf\u5c11\u7cfb\u7edf\u4f53\u79ef\u548c\u91cd\u91cf\uff0c\u8282\u7701\u7cfb\u7edf\u6210\u672c\u3002\u800c\u968f\u7740800V\u6c7d\u8f66\u67b6\u6784\u5e73\u53f0\u7b49\u66f4\u9ad8\u538b\u5e94\u7528\u7684\u8fdb\u4e00\u6b65\u53d1\u5c55\uff0c\u66f4\u9ad8\u538bSiC\u529f\u7387\u5668\u4ef6\u7684\u9700\u6c42\u4e5f\u9010\u6e10\u589e\u957f\u3002\u5728\u6b64\u80cc\u666f\u4e0b\uff0c1200V SiC MOSFET\u5f00\u59cb\u5d2d\u9732\u5934\u89d2\u3002<\/p>\n

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\"\"
<\/figcaption><\/figure>\n

Wolfspeed \u9ad8\u7ea7\u5e94\u7528\u5de5\u7a0b\u5e08 \u9648\u5efa\u9f99<\/p>\n

\u70c1\u79d1\u6676\u4f53<\/strong><\/p>\n

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\u7136\u800c\uff0cSiC\u76ee\u524d\u4ecd\u5904\u4e8e\u521d\u6b65\u53d1\u5c55\u9636\u6bb5\uff0c\u8fd8\u6709\u4e00\u7cfb\u5217\u96be\u9898\u4e9f\u5f85\u89e3\u51b3\u3002\u5176\u4e2d\uff0cSiC\u5355\u6676\u7684\u5236\u5907\u4e00\u76f4\u662f\u5168\u7403\u6027\u6280\u672f\u96be\u9898\uff0c\u6bd4\u5982\u9700\u8981\u5e94\u5bf9\u70b9\u7ebf\u9762\u4f53\u591a\u79cd\u7f3a\u9677\u95ee\u9898\uff1b\u800c\u9ad8\u7a33\u5b9a\u6027\u7684\u6676\u4f53\u751f\u957f\u5de5\u827a\u662f\u5176\u4e2d\u6700\u6838\u5fc3\u7684\u6280\u672f\uff0c\u7269\u7406\u6c14\u76f8\u4f20\u8f93\u6cd5\u5219\u662f\u76ee\u524d\u6210\u719f\u9ad8\u3001\u53ef\u5b9e\u73b0\u4ea7\u4e1a\u5316\u5927\u89c4\u6a21\u751f\u4ea7\u7684SiC\u5355\u6676\u751f\u957f\u65b9\u6cd5\u3002<\/p>\n

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\u4f5c\u4e3a\u4e3b\u529b\u519b\u4e4b\u4e00\uff0c\u70c1\u79d1\u6676\u4f53\u62e5\u6709\u8986\u76d6SiC\u751f\u957f\u88c5\u5907\u5236\u9020\u3001\u9ad8\u7eaf\u78b3\u5316\u7845\u7c89\u6599\u5236\u5907\u5de5\u827a\u3001SiC\u5355\u6676\u886c\u5e95\u5236\u5907\u4e0e\u52a0\u5de5\u5de5\u827a\u7684\u81ea\u4e3b\u7814\u53d1\u751f\u4ea7\u80fd\u529b\uff0c\u5df2\u7a81\u7834\u6676\u4f53\u751f\u957f\u3001\u5207\u5272\u629b\u5149\u7b49\u5173\u952e\u6280\u672f\uff0c\u7c89\u6599\u7eaf\u5ea6\u8fbe\u523099.9999%\uff0c\u5e76\u5b9e\u73b0\u9ad8\u7eaf\u5ea6SiC\u5355\u6676\u7684\u5546\u4e1a\u5316\u91cf\u4ea7\uff0c\u4e14\u5df2\u6210\u529f\u5b9e\u73b08\u82f1\u5bf8SiC\u5355\u6676\u7814\u5236\uff0c\u653b\u514b\u4e86\u5927\u5c3a\u5bf8\u7c7d\u6676\u83b7\u5f97\u96be\u3001\u6676\u4f53\u751f\u957f\u9762\u4e34\u7684\u5e94\u529b\u5927\u53ca\u6676\u4f53\u5f00\u88c2\u7b49\u95ee\u9898\uff0c\u4ea7\u54c1\u5df2\u5b9e\u73b0\u5c0f\u6279\u91cf\u751f\u4ea7\u548c\u9500\u552e\u3002<\/p>\n

\"\"
<\/figcaption><\/figure>\n

\u70c1\u79d1\u6676\u4f53 \u603b\u7ecf\u7406\u52a9\u7406 \u9a6c\u5eb7\u592b<\/p>\n

AIXTRON<\/strong><\/p>\n

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G10-SiC\u5b9e\u73b0\u4e86\u884c\u4e1a\u5185\u9886\u5148\u7684\u5de5\u827a\u8154\u4f53\u5229\u7528\u7387\u4ee5\u53ca\u5355\u8154\u751f\u4ea7\u80fd\u529b\uff0c\u5e2e\u52a9\u5ba2\u6237\u5b9e\u73b0\u9ad8\u54c1\u8d28\u3001\u9ad8\u4ea7\u91cf\u3001\u9ad8\u6027\u4ef7\u6bd4\u7684\u5916\u5ef6\u7247\uff0c\u6ee1\u8db3\u7535\u529b\u7535\u5b50\u91cf\u4ea7\u7684\u9700\u6c42\u3002\u9488\u5bf9GaN\u5916\u5ef6\uff0cAIXTRON G5+C\u8bbe\u5907\u540c\u6837\u6ee1\u8db36\u82f1\u5bf8\u548c8\u82f1\u5bf8\u7684GaN on Si\u5916\u5ef6\u751f\u4ea7\uff0c\u642d\u8f7dC2C\u81ea\u52a8\u5361\u5323\u6676\u5706\u4f20\u8f93\u6280\u672f\u548c\u539f\u4f4d\u6e05\u6d01\u6280\u672f\uff0c\u9002\u7528\u4e8eGaN\u529f\u7387\u5668\u4ef6\u4ee5\u53caMicro LED\u4ea7\u54c1\u7684\u5927\u89c4\u6a21\u751f\u4ea7\u3002<\/p>\n

\"\"
<\/figcaption><\/figure>\n

AIXTRON \u526f\u603b\u7ecf\u7406 \u65b9\u5b50\u6587\u535a\u58eb<\/p>\n

\u6cf0\u79d1\u5929\u6da6<\/strong><\/p>\n

\u529f\u7387\u534a\u5bfc\u4f53\u5668\u4ef6\u662f\u6784\u6210\u7535\u529b\u7535\u5b50\u53d8\u6362\u88c5\u7f6e\u7684\u6838\u5fc3\u5668\u4ef6\u3002\u5176\u4e2d\uff0cMOSFET\u56e0\u5177\u6709\u6613\u4e8e\u9a71\u52a8\u3001\u5f00\u5173\u901f\u5ea6\u5feb\u3001\u635f\u8017\u4f4e\u7b49\u7279\u70b9\uff0c\u9010\u6e10\u6210\u4e3a\u529f\u7387\u5668\u4ef6\u7684\u4e3b\u6d41\u4ea7\u54c1\u3002<\/p>\n

\u76f8\u6bd4\u4f20\u7edf\u7845\u529f\u7387\u534a\u5bfc\u4f53\uff0cSiC MOSFET\u5177\u6709\u5927\u7981\u5e26\u5bbd\u5ea6\u3001\u9ad8\u4e34\u754c\u51fb\u7a7f\u573a\u5f3a\u3001\u9ad8\u70ed\u5bfc\u7387\u4e09\u4e2a\u6700\u663e\u8457\u7279\u5f81\uff0c\u6709\u52a9\u9ad8\u538b\u3001\u9ad8\u529f\u7387\u5e94\u7528\u63d0\u5347\u7cfb\u7edf\u6548\u7387\u3001\u964d\u4f4e\u635f\u8017\u548c\u6210\u672c\u3002<\/p>\n

\u5149\u4f0f\u3001\u50a8\u80fd\u3001\u5145\u7535\u6869\u6709\u91cf\u4e14\u8fd0\u884c\u73af\u5883\u6076\u52a3\uff0c\u662fSiC\u5668\u4ef6\u7684\u8dd1\u9a6c\u573a\u3002\u800cSiC MOSFET\u5de5\u4e1a\u7ea7\u8d77\u6b65\uff0c\u4f46\u4ecd\u9700\u9075\u5faa\u7845\u5668\u4ef6\u7684\u53d1\u5c55\u8def\u5f84\u3002<\/p>\n

\u76ee\u524d\uff0cSiC MOSFET\u6210\u719f\u5ea6\u4ecd\u4e0d\u9ad8\uff0c\u4e14\u7b26\u5408\u5e94\u7528\u573a\u666f\u8981\u6c42\u7684SiC MOSFET\u9700\u8981\u4ece\u591a\u4e2a\u7ef4\u5ea6\u8861\u91cf\u548c\u6d4b\u8bd5\u3002\u5176\u4e2d\uff0c\u53ef\u9760\u6027\u662f\u5165\u573a\u5238\uff0c\u53e6\u5916\u8fd8\u9700\u8981\u5177\u5907\u7a33\u5b9a\u6027\u4e00\u81f4\u3001\u6613\u7528\u6027\u3001\u6027\u80fd\u591f\u7528\u3001\u4ef7\u683c\u53cb\u597d\u7b49\u7279\u70b9\u3002\u9664\u6b64\u4e4b\u5916\uff0c\u5176\u80cc\u540e\u7684\u6750\u6599\u3001\u8bbe\u5907\u3001\u5de5\u827a\u3001\u751f\u4ea7\u6548\u7387\u3001\u8fd0\u7ef4\u6210\u672c\u3001\u6750\u6599\u6210\u672c\u3001\u6d4b\u8bd5\u8bc4\u4ef7\u3001\u4ea7\u54c1\u5b9a\u4e49\u7b49\u90fd\u662f\u9700\u8981\u8003\u91cf\u7684\u56e0\u7d20\u3002<\/p>\n

\u603b\u7684\u6765\u8bf4\uff0c\u5e94\u5f53\u7406\u6027\u770b\u5f85SiC MOSFET\u5355\u4e2a\u4ea7\u54c1\u4e43\u81f3\u6574\u4e2aSiC\u4ea7\u4e1a\u7684\u53d1\u5c55\u3002\u76ee\u524d\uff0c\u56fd\u4ea7SiC MOSFET\u5728\u7279\u6027\u3001\u4e00\u81f4\u6027\u3001\u53ef\u9760\u6027\u53ca\u5e94\u7528\u9a8c\u8bc1\u7b49\u65b9\u9762\u4e0e\u56fd\u9645\u9886\u5148\u6c34\u5e73\u8fd8\u6709\u660e\u663e\u7684\u5dee\u8ddd\uff0c\u4e0d\u8fc7\uff0c\u4ee5\u7a33\u624e\u7a33\u6253\u505a\u597d\u6301\u4e45\u6218\u51c6\u5907\u7684\u6001\u5ea6\uff0c\u8ddf\u4e0a\u56fd\u9645\u53d1\u5c55\u811a\u6b65\u4e0d\u6389\u961f\u5c31\u7b97\u662f\u80dc\u5229\uff0c\u6700\u7ec8\u5171\u540c\u52a9\u63a8SiC\u4ea7\u4e1a\u7684\u5927\u89c4\u6a21\u4ea7\u4e1a\u5316\u3002<\/p>\n

\"\"
<\/figcaption><\/figure>\n

\u6cf0\u79d1\u5929\u6da6 \u5e94\u7528\u6d4b\u8bd5\u4e2d\u5fc3\u603b\u76d1 \u9ad8\u8fdc<\/p>\n

\u9553\u672a\u6765<\/strong><\/p>\n

\u8fd1\u5e74\u6765\uff0c\u7b2c\u4e09\u4ee3\u534a\u5bfc\u4f53GaN\u5728PD\u5feb\u5145\u884c\u4e1a\u8fc5\u901f\u53d1\u5c55\u7684\u57fa\u7840\u4e0a\uff0c\u9010\u6e10\u62d3\u5c55\u5230\u901a\u8baf\u3001\u6c7d\u8f66\u3001\u5de5\u4e1a\u3001\u6570\u636e\u4e2d\u5fc3\u7535\u6e90\u3001\u5149\u4f0f\u50a8\u80fd\u7b49\u5e94\u7528\u9886\u57df\uff0c\u52a9\u529b\u63d0\u5347\u7cfb\u7edf\u8f6c\u6362\u6548\u7387\u548c\u529f\u7387\u5bc6\u5ea6\uff0c\u964d\u4f4e\u80fd\u8017\uff0c\u8d4b\u80fd\u7eff\u8272\u5730\u7403\u4e0b\u7684\u53cc\u78b3\u5efa\u8bbe\u3002<\/p>\n

\u5176\u4e2d\uff0c\u6237\u5916\u7535\u6e90\u4f5c\u4e3a\u4e00\u79cd\u4fbf\u643a\u5f0f\u50a8\u80fd\u4ea7\u54c1\uff0c\u5728\u4f11\u95f2\u5a31\u4e50\u3001\u6237\u5916\u4f5c\u4e1a\u548c\u5e94\u6025\u6551\u63f4\u7b49\u65b9\u9762\u5e94\u7528\u5e7f\u6cdb\uff0c\u5728\u80fd\u6e90\u8282\u7ea6\u5927\u6f6e\u4e0b\u5c06\u8fce\u6765\u5e7f\u9614\u7684\u5e02\u573a\u9700\u6c42\u3002<\/p>\n

\u5728\u6237\u5916\u7535\u6e90\u4e2d\uff0c\u53cc\u5411\u9006\u53d8\u5668\u662f\u6838\u5fc3\u88c5\u7f6e\uff0c\u800cGaN\u5728\u5de5\u4f5c\u9891\u7387\u548c\u8f6c\u6362\u6548\u7387\u7b49\u65b9\u9762\u7684\u4f18\u52bf\u51f8\u663e\uff0c\u5df2\u6210\u4e3a\u53cc\u5411\u9006\u53d8\u5668\u5dee\u5f02\u5316\u7ade\u4e89\u7684\u7406\u60f3\u9009\u62e9\uff0c\u5176\u65e2\u7b26\u5408\u6237\u5916\u4f5c\u4e1a\u5bf9\u9632\u6c34\u9632\u5c18\u7684\u5e94\u7528\u8981\u6c42\uff0c\u6ee1\u8db3\u5e02\u573a\u5bf9\u65e0\u98ce\u6247\u6237\u5916\u7535\u6e90\u8bbe\u8ba1\u9700\u6c42\uff0c\u53c8\u6709\u52a9\u4e8e\u5ef6\u957f\u6237\u5916\u7535\u6e90\u7684\u4f7f\u7528\u5bff\u547d\u548c\u53ef\u9760\u6027\uff0c\u63d0\u9ad8\u5145\u7535\u6548\u7387\uff0c\u4ece\u800c\u63d0\u5347\u6574\u4f53\u7528\u6237\u4f53\u9a8c\u3002<\/p>\n

\u9762\u5bf9\u6237\u5916\u7535\u6e90\u7684\u5e94\u7528\u5546\u673a\uff0c\u9553\u672a\u6765\u81ea2021\u5e74\u5f00\u59cb\u5927\u529b\u62d3\u5c55GaN\u5728\u53cc\u5411\u9006\u53d8\u5668\u7684\u5e94\u7528\uff0c\u91cd\u70b9\u805a\u7126\u6237\u5916\u7535\u6e90\u5e94\u7528\u573a\u666f\uff0c\u5e76\u7387\u5148\u63a8\u51fa4kW GaN\u5927\u529f\u7387\u65e0\u98ce\u6247\u53cc\u5411\u9006\u53d8\u5668\u6280\u672f\u5e73\u53f0\uff0c\u5404\u9879\u53c2\u6570\u6307\u6807\u5904\u4e8e\u5148\u8fdb\u6c34\u5e73\uff0c\u5df2\u6210\u4e3a\u6237\u5916\u7535\u6e90\u7b49\u4e2d\u5927\u529f\u7387\u5e94\u7528\u7684\u9996\u9009\u3002\u76ee\u524d\uff0c\u9553\u672a\u6765\u7684GaN\u7cfb\u5217\u4ea7\u54c1\u5df2\u8986\u76d6\u6d88\u8d39\u3001\u5de5\u4e1a\u53ca\u8f66\u89c4\u7b49\u4e0d\u540c\u7c7b\u522b\u7684\u5e94\u7528\u3002<\/p>\n

\"\"
<\/figcaption><\/figure>\n

\u73e0\u6d77\u9553\u672a\u6765 \u5e94\u7528&\u5e02\u573a\u526f\u603b\u88c1 \u80e1\u5b97\u6ce2\u535a\u58eb<\/p>\n

\u4e09\u83f1\u7535\u673a<\/strong><\/p>\n

\u5bb6\u7535\u3001\u5de5\u4e1a\u65b0\u80fd\u6e90\u3001\u7275\u5f15\u7535\u529b\u3001\u6c7d\u8f66\u7b49\u5e94\u7528\u573a\u666f\u4e2d\u5bf9\u4f4e\u635f\u8017\u5668\u4ef6\u6709\u7740\u5e7f\u9614\u7684\u9700\u6c42\uff0cSiC\u56e0\u5176\u8010\u9ad8\u538b\u3001\u8010\u9ad8\u6e29\u3001\u9ad8\u9891\u7387\u3001\u4f4e\u635f\u8017\u7b49\u4f18\u5f02\u7684\u7279\u6027\uff0c\u6b63\u5728\u9010\u6e10\u6e17\u900f\u4e0a\u8ff0\u5e94\u7528\u5e02\u573a\uff0c\u4f46SiC\u4ea7\u4e1a\u4ecd\u5904\u4e8e\u53d1\u5c55\u521d\u671f\uff0c\u8fd8\u9762\u4e34\u7740\u4e0d\u5c11\u6280\u672f\u96be\u9898\u3002<\/p>\n

\u4f8b\u5982\uff0c\u5728SiC\u529f\u7387\u6a21\u5757\u7684\u5e94\u7528\u5c42\u9762\uff0c\u9700\u8981\u7279\u522b\u6ce8\u610f\u5f00\u5173\u901f\u5ea6\u5feb\u3001\u7535\u6c14\u7279\u6027\u65f6\u6f02\u548c\u77ed\u8def\u8010\u91cf\u504f\u5c0f\u7b49\u95ee\u9898\u3002\u9488\u5bf9\u8fd9\u4e9b\u95ee\u9898\u4ee5\u53ca\u5bb6\u7535\u3001\u5de5\u4e1a\u3001\u8f68\u9053\u7275\u5f15\u7b49\u9886\u57df\u5bf9SiC\u5668\u4ef6\u548c\u6a21\u5757\u7684\u8981\u6c42\uff0c\u4e09\u83f1\u7535\u673a\u5df2\u5f00\u53d1\u76f8\u5e94\u7684\u89e3\u51b3\u65b9\u6848\u3002<\/p>\n

\u4e09\u83f1\u7535\u673a\u81ea1994\u5e74\u6295\u5165SiC\u6280\u672f\u7684\u7814\u53d1\uff0c\u8fd1\u5e74\u6765\u6301\u7eed\u53d1\u529bSiC\u529f\u7387\u6a21\u5757\u5e02\u573a\uff0c2010\u5e74\u63a8\u51fa\u4e16\u754c\u9996\u6b3e\u7a7a\u8c03SiC\u529f\u7387\u6a21\u5757\uff0c\u540e\u4e8e2015\u5e74\u6210\u4e3a\u65b0\u5e72\u7ebf\u9ad8\u94c1\u5168SiC\u529f\u7387\u6a21\u5757\u7684\u9996\u4f4d\u4f9b\u5e94\u5546\u3002\u76ee\u524d\uff0c\u4e09\u83f1\u7535\u673a\u5df2\u5f00\u53d1\u7b2c\u4e09\u4ee3\u4f4e\u7535\u538bSiC MOSFET (MIT2-MOSTM)\uff0c\u91c7\u7528\u57fa\u4e8e\u6c9f\u69fd\u6805\u7ed3\u6784\u7684\u591a\u79bb\u5b50\u503e\u659c\u6ce8\u5165\u6280\u672f\uff0c\u53ef\u5b9e\u73b0\u6805\u6781\u6c27\u5316\u5c42\u7684\u9ad8\u53ef\u9760\u6027\u3002<\/p>\n

\u53e6\u5916\uff0c\u91c7\u7528SBD-Embedded\u7684SiC MOSFET\u6280\u672f\u4f7f\u9ad8\u538bSiC\u6a21\u5757\u7684\u957f\u671f\u53ef\u9760\u6027\u6709\u4e86\u8fdb\u4e00\u6b65\u7684\u63d0\u9ad8\uff0c\u5e76\u5df2\u63a8\u51fa\u91c7\u7528\u6b64\u6280\u672f\u76843.3kV SiC\u6a21\u5757FMF800DC-66BEW\u3002<\/p>\n

\u73b0\u9636\u6bb5\uff0c\u4e09\u83f1\u7535\u673a\u91c7\u7528\u4e0d\u540c\u5c01\u88c5\u6280\u672f\u5f00\u53d1\u7684SiC\u529f\u7387\u6a21\u5757\u5df2\u5728\u53d8\u9891\u7a7a\u8c03\u3001\u533b\u7597\u8bbe\u5907\u3001\u50a8\u80fd\u7cfb\u7edf\u548c\u8f68\u9053\u7275\u5f15\u7b49\u9886\u57df\u5f97\u5230\u5546\u4e1a\u5316\u5e94\u7528\u3002<\/p>\n

\"\"
<\/figcaption><\/figure>\n

\u4e09\u83f1\u7535\u673a \u9879\u76ee\u7ecf\u7406 \u5f20\u8fdc\u7a0b<\/p>\n

\u5929\u57df\u534a\u5bfc\u4f53<\/strong><\/p>\n

\u51ed\u501f\u5bbd\u7981\u5e26\u3001\u9ad8\u51fb\u7a7f\u7535\u573a\u5f3a\u5ea6\u3001\u9ad8\u7535\u5b50\u9971\u548c\u6f02\u79fb\u901f\u7387\u3001\u9ad8\u7194\u70b9\u3001\u9ad8\u70ed\u5bfc\u7387\u7b49\u7279\u6027\uff0cSiC\u5728\u65b0\u80fd\u6e90\u6c7d\u8f66\u3001\u5149\u4f0f\u50a8\u80fd\u3001\u5de5\u4e1a\u53ca\u8f68\u9053\u4ea4\u901a\u7b49\u9886\u57df\u7684\u6e17\u900f\u7387\u9010\u6e10\u63d0\u5347\uff0c\u672a\u6765\uff0cSiC\u5668\u4ef6\u7684\u5e02\u573a\u89c4\u6a21\u5c06\u968f\u7740\u76f8\u5173\u5e94\u7528\u5e02\u573a\u7684\u53d1\u5c55\u800c\u8fdb\u4e00\u6b65\u6269\u5927\u3002<\/p>\n

SiC\u4ea7\u4e1a\u94fe\u4e3b\u8981\u5206\u4e3a\u886c\u5e95\u5236\u5907\u3001\u5916\u5ef6\u751f\u957f\u3001\u5668\u4ef6\u5236\u9020\u3001\u6a21\u5757\u5c01\u6d4b\u548c\u7cfb\u7edf\u5e94\u7528\u7b49\u73af\u8282\uff0c\u5176\u4e2d\uff0c\u5916\u5ef6\u4f5c\u4e3a\u627f\u4e0a\u542f\u4e0b\u7684\u91cd\u8981\u73af\u8282\uff0c\u5bf9\u5668\u4ef6\u7684\u53ef\u9760\u6027\u6709\u7740\u5173\u952e\u7684\u5f71\u54cd\uff0c\u4e5f\u56e0\u6b64\uff0c\u5916\u5ef6\u8bbe\u5907\u4e5f\u53d1\u6325\u7740\u91cd\u8981\u7684\u4f5c\u7528\u3002CVD\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u6cd5\u662f\u76ee\u524d\u4e3b\u6d41\u7684SiC\u5916\u5ef6\u5236\u5907\u65b9\u6cd5\uff0c\u5206\u4e3a\u5782\u76f4\u3001\u6c34\u5e73\u548c\u884c\u661f\u5f0f\u4e09\u79cd\u751f\u957f\u7cfb\u7edf\uff0c\u5f88\u5927\u7a0b\u5ea6\u4e0a\u51b3\u5b9a\u7740\u5916\u5ef6\u7247\u7684\u6ce2\u957f\u5747\u5300\u6027\u548c\u7f3a\u9677\u5bc6\u5ea6\u6c34\u5e73\uff0c\u6700\u7ec8\u5f71\u54cd\u5668\u4ef6\u7684\u826f\u7387\u548c\u6210\u672c\u3002<\/p>\n

\u5929\u57df\u534a\u5bfc\u4f53\u662f\u56fd\u5185\u6700\u65e9\u5b9e\u73b0SiC\u5916\u5ef6\u7247\u4ea7\u4e1a\u5316\u7684\u4f01\u4e1a\uff0c\u73b0\u62e5\u67093\u4e2a\u8fd0\u8425\u57fa\u5730\uff0c\u5df2\u5b9e\u73b0\u5168\u7403\u5316\u7684\u5e03\u5c40\uff0c\u662f\u6211\u56fdSiC\u9886\u57df\u5c11\u6570\u5177\u5907\u56fd\u9645\u7ade\u4e89\u529b\u7684\u4f01\u4e1a\u4e4b\u4e00\u3002\u76ee\u524d\uff0c\u5929\u57df\u534a\u5bfc\u4f53\u6b63\u5728\u6301\u7eed\u6269\u5efa\u4ea7\u7ebf\u5e76\u52a0\u5927\u7814\u53d1\u6295\u5165\uff0c\u76ee\u6807\u662f\u4e0d\u65ad\u4f18\u5316\u5916\u5ef6\u5de5\u827a\uff0c\u63d0\u5347SiC\u5916\u5ef6\u5c42\u7684\u8d28\u91cf\uff0c\u7814\u53d1\u5927\u5c3a\u5bf8\u3001\u539aSiC\u5916\u5ef6\u7247\u3002<\/p>\n

\"\"
<\/figcaption><\/figure>\n

\u5929\u57df\u534a\u5bfc\u4f53 FAE\u7ecf\u7406 \u4f55\u946b<\/p>\n

\u96c6\u90a6\u54a8\u8be2<\/strong><\/p>\n

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\"\"
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