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optics\uff1bCPO\uff09\u5c31\u88ab\u63d0\u51fa\u6765\uff0c\u900f\u8fc7\u5148\u8fdb\u7684\u5c01\u88c5\u6280\u672f\uff0c\u4ee5\u53ca\u7535\u5b50\u5b66\u548c\u5149\u5b50\u5b66\u7684\u6700\u4f73\u5316\u6574\u5408\uff0c\u6765\u5927\u5e45\u7f29\u77ed\u7535\u6c14\u94fe\u8def\u957f\u5ea6\uff0c\u4ece\u800c\u63d0\u9ad8\u4e92\u8fde\u9891\u5bbd\u5bc6\u5ea6\u548c\u80fd\u6e90\u6548\u7387\u3002\u56e0\u6b64CPO\u88ab\u5e7f\u6cdb\u8ba4\u4e3a\u662f\u672a\u6765\u6570\u636e\u4e2d\u5fc3\u4e92\u8fde\u7684\u4e00\u4e2a\u6700\u6709\u6548\u7684\u89e3\u51b3\u65b9\u6848\u3002<\/p>\n<p>\u5305\u62ec\u4e86Intel\u3001Broadcom\u548cIBM\u7b49\uff0c\u5168\u7403\u56fd\u9645\u534a\u5bfc\u4f53\u6280\u672f\u9886\u5148\u4e1a\u8005\uff0c\u90fd\u5df2\u7ecf\u6295\u5165\u5927\u91cf\u8d44\u91d1\u5bf9CPO\u6280\u672f\u5c55\u5f00\u6df1\u5165\u7814\u7a76\u3002\u8fd9\u662f\u4e00\u4e2a\u8de8\u5b66\u79d1\u7684\u7814\u7a76\u9886\u57df\uff0c\u6d89\u53ca\u4e86\u5149\u5b50\u5143\u4ef6\u3001\u96c6\u6210\u7535\u8def\u8bbe\u8ba1\u3001\u5c01\u88c5\u3001\u5149\u5b50\u5143\u4ef6\u5efa\u6a21\u3001\u7535\u5b50-\u5149\u5b50\u6574\u5408\u6a21\u62df\u3001\u5e94\u7528\u548c\u6280\u672f(\u56fe\u56db)\u3002<\/p>\n<figure class=\"alignnone no-info-img\"><img decoding=\"async\" loading=\"lazy\" class=\"aligncenter\" src=\"https:\/\/img.cnledw.com\/wp-content\/uploads\/2023\/08\/4.jpg\" alt=\"\" width=\"501\" height=\"299\" \/><figcaption style=\"display: none;\"><\/figcaption><\/figure>\n<p style=\"text-align: center;\">\u56fe\u56db: \u900f\u8fc7CPO\u6280\u672f\u5c06\u5149\u5b50\u5143\u4ef6\u4e0eASIC\u6574\u5408\u5230\u540c\u4e00\u57fa\u677f\u4e0a\u3002<br \/>\n\uff08source\uff1aBroadcom\uff1b\u4f5c\u8005\u6574\u7406\uff09<\/p>\n<p><strong>\u5149\u5b50\u5c01\u88c5\u7684\u7f29\u653e<\/strong><\/p>\n<p>\u5728\u8fc7\u53bb\u6570\u5341\u5e74\u91cc\uff0c\u6469\u5c14\u5b9a\u5f8b\u4e0d\u65ad\u7684\u5bfc\u5f15\u7740CMOS\u5236\u9020\u6280\u672f\u53d1\u5c55\uff0c\u56e0\u6b64\u5927\u591a\u6570\u4eba\u4e5f\u8ba4\u4e3a\u7845\u5149\u5b50\u5b66\u5e94\u8be5\u9075\u5faa\u8fd9\u79cd\u89c4\u6a21\u5316\u8d8b\u52bf\uff0c\u5e76\u81f4\u529b\u4e8e\u900f\u8fc7\u4f4e\u6210\u672c\u5236\u9020\u5149\u5b50\u96c6\u6210\u7535\u8def\uff08PIC\uff09\u6765\u5feb\u901f\u8fbe\u5230\u89c4\u6a21\u7ecf\u6d4e\u3002<\/p>\n<p>\u7136\u800c\uff0c\u4e0e\u7535\u5b50\u5143\u4ef6\u4e0d\u540c\uff0c\u5149\u5b50\u5143\u4ef6\u7684\u7f29\u653e\u672c\u8d28\u4e0a\u662f\u56f0\u96be\u7684\u3002\u5149\u5b50\u5143\u4ef6\u7684\u5c3a\u5bf8\u4e3b\u8981\u7531\u6750\u6599\u7684\u6298\u5c04\u7387\u5bf9\u6bd4\u5ea6\u51b3\u5b9a\uff0c\u56e0\u6b64\u7845\u5149\u5b50\u5143\u4ef6\u7684\u6574\u4f53\u5c3a\u5bf8\u4ecd\u4fdd\u6301\u5728\u5fae\u7c73\u7ea7\u522b\uff0c\u5f88\u96be\u7f29\u51cf\u5230\u7eb3\u7c73\u7ea7\u522b\u3002\u56e0\u6b64\uff0c\u5f53\u6211\u4eec\u8c08\u8bba\u7845\u5149\u5b50\u7684\u7f29\u653e\u65f6\uff0c\u5b9e\u9645\u4e0a\u662f\u63a2\u8ba8\u5148\u8fdb\u7684\u5236\u9020\u6280\u672f\u5982\u4f55\u5b9e\u73b0\u5149\u5b50\u5c01\u88c5\u7684\u7f29\u653e\u3002<\/p>\n<p><strong>\u5c01\u88c5\u6982\u5ff5\u4e0e\u5236\u7a0b\u8fbe\u5230\u6df1\u5ea6\u878d\u5408<\/strong><\/p>\n<p>\u8981\u5b9e\u73b0\u6781\u9ad8\u5bc6\u5ea6\u7684\u5149\u8f93\u5165\/\u8f93\u51fa\uff0c\u5c31\u5fc5\u987b\u91c7\u7528\u9ad8\u6548\u7684\u5149\u7ea4\u8026\u5408\u7ed3\u6784\u3002\u8026\u5408\u7ed3\u6784\u6709\u5149\u6805\u8026\u5408\u5668\u548c\u8fb9\u7f18\u8026\u5408\u5668\u4e24\u79cd\u3002\u5149\u6805\u8026\u5408\u5668\u901a\u5e38\u5229\u7528\u7b80\u5355\u7684\u4e24\u6b65\u9aa4\u8680\u523b\u5236\u7a0b\u751f\u4ea7\uff0c\u6765\u5b9e\u73b0\u5782\u76f4\u5149\u8026\u5408\u3002\u800c\u5149\u6805\u8026\u5408\u5668\u5177\u6709\u76f8\u5bf9\u8f83\u5bbd\u7684\u5bf9\u51c6\u5bb9\u5dee\u3001\u8f83\u5c0f\u7684\u5149\u5b66\u9891\u5bbd\u548c\u8f83\u9ad8\u7684\u504f\u632f\u7075\u654f\u5ea6\u3002<\/p>\n<p>\u56e0\u6b64\uff0c\u4e0e\u8fb9\u7f18\u8026\u5408\u5668\u4e0d\u540c\uff0c\u5149\u6805\u8026\u5408\u5668\u901a\u5e38\u662f\u7528\u4e8e\u6676\u5706\u7ea7\u6d4b\u8bd5\uff0c\u800c\u4e0d\u662f\u5546\u4e1a\u6027\u4ea7\u54c1\u3002\u8fb9\u7f18\u8026\u5408\u5668\u53ef\u5b9e\u73b0\u8f83\u5c0f\u7684\u8026\u5408\u635f\u8017\u548c\u8f83\u5927\u7684\u5149\u5b66\u9891\u5bbd\uff0c\u8fd9\u5bf9\u4e8e\u5b9e\u9645\u5e94\u7528\u6765\u8bf4\u662f\u7406\u60f3\u7684\u3002\u7136\u800c\uff0c\u8fb9\u7f18\u8026\u5408\u5668\u5728\u5236\u9020\u8fc7\u7a0b\u4e2d\u9700\u8981\u5e95\u5207(Undercut)\u548c\u6df1\u8680\u523b\u6280\u672f\uff0c\u800c\u8fd9\u5c31\u4f1a\u5f71\u54cd\u7740\u5143\u4ef6\u7a33\u5b9a\u6027\u548c\u53ef\u9760\u6027\u7684\u95ee\u9898\u3002<\/p>\n<p>On-chip\u5149\u6e90\u7684\u6574\u5408\u662f\u7845\u5149\u5b50\u5b66\u7684\u4e3b\u8981\u6311\u6218\u4e4b\u4e00\u3002\u53ea\u4f9d\u8d56\u7845\u57fa\u6750\u6599\u5f88\u96be\u5f62\u6210\u9ad8\u6027\u80fd\u96f7\u5c04\u5668\u3002\u56e0\u6b64\u4fbf\u5f00\u53d1\u51fa\u5728\u7845\u5149\u5b50\u82af\u7247\u4e0a\u8fdb\u884cIII-V\u5316\u5408\u7269\u6750\u6599\u7684\u5f02\u8d28\u6750\u6599\u6574\u5408\uff0c\u6216\u5f02\u8d28\u7ed3\u6784\u6574\u5408\u7684\u6280\u672f\uff0c\u4f46\u8fd9\u5bf9\u7845\u5149\u5b50\u5236\u9020\u6280\u672f\u6765\u8bf4\uff0c\u8fd8\u662f\u9700\u8981\u8fdb\u884c\u91cd\u5927\u8c03\u6574\u3002<\/p>\n<p>\u672a\u6765\uff0c\u4ece2.5D CPO\u52303D CPO\uff0cCPO\u5236\u7a0b\u5c06\u4e0d\u4ec5\u4ec5\u662f\u4e00\u79cd\u5c01\u88c5\u6280\u672f\uff0c\u800c\u662f\u4e00\u79cd\u5236\u9020\u4e0e\u5c01\u88c5\u7684\u7ed3\u5408\uff0c\u9700\u8981\u8bbe\u8ba1\u4e0e\u5236\u7a0b\u7684\u5171\u540c\u6700\u4f73\u5316\uff0c\u6765\u8ba9\u5c01\u88c5\u6982\u5ff5\u4e0e\u5236\u7a0b\u8fbe\u5230\u6df1\u5ea6\u878d\u5408\u3002<\/p>\n<p><strong>\u8bbe\u6cd5\u964d\u4f4e\u5149\u7ea4\u5c01\u88c5\u96be\u5ea6<\/strong><\/p>\n<p>\u5728\u76ee\u524d\u5927\u591a\u6570CPO\u89e3\u51b3\u65b9\u6848\u4e2d\uff0c\u5149\u8f93\u5165\u548c\u5149\u8f93\u51fa\u7684\u8def\u5f84\u4e2d\u90fd\u4f7f\u7528\u4e86\u8fb9\u7f18\u8026\u5408\u5668\u3002\u8fb9\u7f18\u8026\u5408\u5668\u7ecf\u8fc7\u7cbe\u5fc3\u8bbe\u8ba1\uff0c\u53ef\u540c\u65f6\u6ee1\u8db3\u9ad8\u5bf9\u51c6\u5bb9\u5dee\u548c\u4f4e\u63d2\u5165\u635f\u8017\u7684\u8981\u6c42\u3002\u901a\u8fc7V\u578b\u69fd\uff08V-groove\uff09\u7ed3\u6784\u8fdb\u884c\u88ab\u52a8\u5f0f\u7684\u5bf9\u51c6\uff0c\u5178\u578b\u7684\u5149\u7ea4\u5230\u82af\u7247\u635f\u8017\u53ef\u63a7\u5236\u5728-1.5 dB\u3002\u4f7f\u7528\u70ed\u79fb\u76f8\u5668\uff08Thermal Phase Shifters\uff09\u7b49\u7ed3\u6784\u66f4\u6709\u52a9\u4e8e\u8fdb\u4e00\u6b65\u63d0\u9ad8\u5bf9\u51c6\u5bb9\u5dee\u3002\u7531\u4e8e\u7845\u5149\u5b50\u6536\u53d1\u5668\u662f\u9ad8\u901f\u5f00\u5173\u7ec4\u88c5CPO\u7cfb\u7edf\u7684\u91cd\u8981\u6784\u4ef6\uff0c\u5176\u4e2d\u591a\u4e2a\u6536\u53d1\u5668\u6a21\u7ec4\u7d27\u90bb\u5f00\u5173ASIC\u3002\u5982\u56fe\u6240\u793a\uff0c\u4e2d\u5fc3\u4ea4\u6362\u673aASIC\u5468\u56f4\u6709\u6210\u767e\u4e0a\u5343\u6839\u5149\u7ea4\uff0c\u5176\u4e2d\u65e2\u6709\u4fdd\u6301\u504f\u6781\uff08Polarization-Maintaining\uff1bPM\uff09\u5149\u7ea4\uff0c\u4e5f\u6709\u975e\u4fdd\u6301\u504f\u6781\u5149\u7ea4\u3002\u6240\u4ee5\u5fc5\u987b\u900f\u8fc7\u91c7\u7528\u9ad8\u9636\u8c03\u53d8\u6280\u672f\u548cOn-chip\u5149\u6e90\u7684\u6574\u5408\u6765\u51cf\u5c11\u5149\u7ea4\u6570\u91cf\uff0c\u964d\u4f4e\u5149\u7ea4\u5c01\u88c5\u96be\u5ea6\u3002<\/p>\n<figure class=\"alignnone no-info-img\"><img decoding=\"async\" loading=\"lazy\" class=\"aligncenter\" src=\"https:\/\/img.cnledw.com\/wp-content\/uploads\/2023\/08\/5.jpg\" alt=\"\" width=\"504\" height=\"371\" \/><figcaption style=\"display: none;\"><\/figcaption><\/figure>\n<p>\u56fe\u4e94: \u7528\u4e8e\u5149\u8f93\u5165\u7684\u4fdd\u6301\u504f\u6781\u5149\u7ea4\u548c\u7528\u4e8e\u5149\u8f93\u51fa\u7684\u975e\u4fdd\u6301\u504f\u6781\u5149\u7ea4\u7684\u6df7\u5408\u5c01\u88c5\u3002\uff08source\uff1a\u300aCo-packaged optics (CPO): status, challenges, and solutions\u300b\uff09<\/p>\n<p><strong>\u5229\u7528\u5f02\u8d28\u7ed3\u6784\u6574\u5408\u548c\u5f02\u8d28\u6574\u5408<\/strong><\/p>\n<p>On-chip\u5149\u6e90\u7684\u6574\u5408\u65b9\u6cd5\u5305\u62ec\u5f02\u8d28\u7ed3\u6784\u6574\u5408\uff08\u4f8b\u5982\u96f7\u5c04\u4e8c\u6781\u4f53\u7684Flip-Chip Bonding\uff09\u548c\u5f02\u8d28\u6574\u5408\uff08\u4f8b\u5982\uff0cWafer-Level Material Bonding\uff09\u3002<\/p>\n<p>\u5728Flip-Chip Bonding\u65b9\u6cd5\u4e2d\uff0c\u5c06\u4e00\u822c\u96f7\u5c04\u4e8c\u6781\u4f53\u900f\u8fc7\u5171\u6676\u710a\u63a5\u7684\u65b9\u5f0f\u8d34\u5408\u5728\u7845\u5149\u5b50\u82af\u7247\u4e0a\u3002\u96f7\u5c04\u82af\u7247\u548c\u7845\u5149\u5b50\u82af\u7247\u4e4b\u95f4\u91c7\u7528Mechanical stops\u548cfiducial marks\u8fdb\u884c\u9ad8\u7cbe\u5ea6\u975e\u4e3b\u52a8\u5f0f\u5bf9\u51c6\u3002\u56e0\u4e3a\u5229\u7528\u4e86\u6210\u719f\u7684\u96f7\u5c04\u4e8c\u6781\u4f53\u4ea7\u54c1\uff0c\u6765\u7b80\u5316\u4e86\u5f00\u53d1\u8fc7\u7a0b\uff0c\u8fdb\u800c\u5b9e\u73b0\u4e86\u5feb\u901f\u5546\u4e1a\u5316\u3002\u800c\u5728Wafer-Level Material Bonding\u65b9\u6cd5\u4e2d\uff0c\u96f7\u5c04\u5668\u662f\u5728\u7845\u5149\u5b50\u82af\u7247\u5236\u9020\u8fc7\u7a0b\u4e2d\u6240\u5f62\u6210\u7684\uff0c\u6240\u4ee5III-V\u6750\u6599\u548c\u7845\u6ce2\u5bfc\u4e4b\u95f4\u7684\u6a21\u5f0f\u8f6c\u53d8\u5668\u9700\u8981\u5bf9\u751f\u4ea7\u7ebf\u524d\u7aef\u7684\u5236\u7a0b\u8fdb\u884c\u4fee\u6539\u3002\u96f7\u5c04\u7535\u6781\u7684\u5236\u9020\u4f1a\u5bfc\u81f4\u751f\u4ea7\u7ebf\u540e\u7aef\u7684\u5236\u7a0b\u6539\u53d8\u3002<\/p>\n<p>\u603b\u4e4b\uff0c\u7845\u5149\u5b50\u751f\u4ea7\u7ebf\u9700\u8981\u5927\u89c4\u6a21\u91cd\u5efa\uff0c\u6765\u5b9e\u73b0\u5f02\u8d28\u6574\u5408\u3002\u7136\u800c\u8fd9\u4e24\u79cd\u65b9\u6cd5\u90fd\u9700\u8981\u8003\u8651\u6563\u70ed\u548c\u5e94\u53d8\u6240\u5f15\u8d77\u7684\u6027\u80fd\u4e0b\u964d\u95ee\u9898\uff0c\u4ee5\u4fbf\u5c06\u6765\u80fd\u987a\u5229\u5e94\u7528\u4e8eCPO(\u56fe\u516d)\u3002<\/p>\n<figure class=\"alignnone no-info-img\"><img decoding=\"async\" loading=\"lazy\" class=\"aligncenter\" src=\"https:\/\/img.cnledw.com\/wp-content\/uploads\/2023\/08\/6.jpg\" alt=\"\" width=\"496\" height=\"213\" \/><figcaption style=\"display: none;\"><\/figcaption><\/figure>\n<p>\u56fe\u516d: (a) On-chip\u5149\u6e90\u7684\u5f02\u8d28\u7ed3\u6784\u6574\u5408\uff1b(b)\u5f02\u8d28\u6750\u6599\u6574\u5408\u3002\uff08source\uff1a\u300aCo-packaged optics (CPO): status, challenges, and solutions\u300b\uff09<\/p>\n<p>\u57283D-CPO\u7684\u7ed3\u6784\u4e0b\uff0c\u7845\u5149\u5b50\u82af\u7247\u53ef\u4f5c\u4e3a\u4e2d\u4ecb\u5c42\uff0c\u5b9e\u73b0\u66f4\u77ed\u7684\u7535\u8def\u8fde\u63a5\u548c\u66f4\u4f4e\u7684\u529f\u8017\u3002\u6700\u8fd1\uff0cimec\u5c55\u793a\u4e86\u4e00\u79cd\u5d4c\u5165\u7845\u901a\u5b54\uff08TSV\uff09\u7ed3\u6784\u7684\u6df7\u5408\u7ec4\u88c5\u5149\u5b66\u6a21\u7ec4\uff0c\u5176\u5c04\u9891\u7684\u9891\u5bbd\u8d85\u8fc7\u4e86110 GHz\uff0c\u4e3a\u4e0b\u4e00\u4ee3\u9700\u8981\u5728100G baud\u901f\u7387\u8fd0\u4f5c\u7684\u7845\u5149\u5b50\u6a21\u7ec4\u514b\u670d\u4e86\u969c\u788d(\u56fe\u4e03)\u3002\u5728\u7845\u5149\u5b50\u82af\u7247\u4e0a\u5236\u9020TSV\u9700\u8981\u989d\u5916\u7684\u5236\u7a0b\u6280\u672f\uff0c\u5305\u62ec\u9ad8\u5bbd\u6bd4\u7684Bosch\u6df1\u53cd\u5e94\u6027\u8680\u523b\uff0c\u548c\u6676\u5706\u8584\u5316\u5236\u7a0b\uff0c\u8fd9\u4e9b\u90fd\u53ef\u80fd\u4f1a\u5e26\u6765\u4ea7\u91cf\u548c\u53ef\u9760\u6027\u65b9\u9762\u7684\u95ee\u9898\u3002<\/p>\n<figure class=\"alignnone no-info-img\"><img decoding=\"async\" loading=\"lazy\" class=\"\" src=\"https:\/\/img.cnledw.com\/wp-content\/uploads\/2023\/08\/7.jpg\" alt=\"\" width=\"506\" height=\"418\" \/><figcaption style=\"display: none;\"><\/figcaption><\/figure>\n<p>\u56fe\u4e03: 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