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8\u6708\uff0c\u636e\u300a\u65e0\u673a\u6750\u6599\u5b66\u62a5\u300b\u6d88\u606f\uff0c\u5c71\u4e1c\u5927\u5b66\u4e0e\u5357\u7802\u6676\u5706\u57288\u82f1\u5bf8SiC\u886c\u5e95\u4f4d\u9519\u7f3a\u9677\u63a7\u5236\u65b9\u9762\u53d6\u5f97\u4e86\u91cd\u5927\u7a81\u7834\uff0c\u4f7f\u7528\u7269\u7406\u6c14\u76f8\u4f20\u8f93\u6cd5\u5b9e\u73b0\u4e86\u8fd1\u201c\u96f6\u87ba\u4f4d\u9519\uff08TSD\uff09\u201d\u5bc6\u5ea6\u548c\u4f4e\u57fa\u5e73\u9762\u4f4d\u9519\uff08BPD\uff09\u5bc6\u5ea6\u76848\u82f1\u5bf8\u5bfc\u7535\u578b4H-SiC\u5355\u6676\u886c\u5e95\u5236\u5907\uff0c\u5176\u4e2d\u87ba\u4f4d\u9519\u5bc6\u5ea6\u4e3a0.55 cm-2\uff0c\u57fa\u5e73\u9762\u4f4d\u9519\u5bc6\u5ea6\u4e3a202 cm-2\u3002<\/p>\n

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\u540c\u5149\u80a1\u4efd<\/strong><\/p>\n

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\n2021\u5e749\u6708\uff0c\u540c\u5149\u6676\u4f53\u78b3\u5316\u7845\u5355\u6676\u6d9e\u6e90\u9879\u76ee\u6b63\u5f0f\u6295\u4ea7\uff0c\u9879\u76ee\u603b\u6295\u8d4410\u4ebf\u5143\uff0c\u8ba1\u5212\u589e\u8d2d\u5355\u6676\u751f\u957f\u7089600\u53f0\uff0c\u6ee1\u4ea7\u540e\u8fbe\u5230\u5e74\u4ea710\u4e07\u7247\u751f\u4ea7\u80fd\u529b\u3002<\/p>\n

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\u5929\u79d1\u5408\u8fbe<\/strong><\/p>\n

2023\u5e741\u6708\uff0c\u5929\u79d1\u5408\u8fbe\u7814\u53d1\u56e2\u961f\u5728\u300a\u4eba\u5de5\u6676\u4f53\u5b66\u62a5\u300b\u4e0a\u53d1\u88688\u82f1\u5bf8\u5bfc\u7535\u578bSiC\u5355\u6676\u886c\u5e95\u5236\u5907\u4e0e\u8868\u5f81\u91cd\u8981\u6587\u7ae0\u3002\u6839\u636e\u5185\u5bb9\uff0c\u5929\u79d1\u5408\u8fbe\u7814\u53d1\u56e2\u961f\u4f7f\u7528\u7269\u7406\u6c14\u76f8\u4f20\u8f93\u6cd5(PVT)\u901a\u8fc7\u6269\u5f84\u6280\u672f\u5236\u5907\u51fa\u76f4\u5f84\u4e3a209 mm\u76844H-SiC\u5355\u6676\uff0c\u5e76\u901a\u8fc7\u591a\u7ebf\u5207\u5272\u3001\u7814\u78e8\u548c\u629b\u5149\u7b49\u4e00\u7cfb\u5217\u52a0\u5de5\u5de5\u827a\u5236\u5907\u51fa\u6807\u51c68\u82f1\u5bf8SiC\u5355\u6676\u886c\u5e95\u3002<\/p>\n

5\u6708\uff0c\u5929\u79d1\u5408\u8fbe\u4e0e\u82f1\u98de\u51cc\u7b7e\u8ba2\u4e86\u4e00\u4efd\u957f\u671f\u534f\u8bae\uff0c\u4e3a\u5176\u4f9b\u5e94\u78b3\u5316\u7845\u6750\u6599\u3002\u6839\u636e\u8be5\u534f\u8bae\uff0c\u7b2c\u4e00\u9636\u6bb5\u5c06\u4fa7\u91cd\u4e8e150\u6beb\u7c73\u78b3\u5316\u7845\u6750\u6599\u7684\u4f9b\u5e94\uff0c\u5e76\u5c06\u63d0\u4f9b200\u6beb\u7c73\u76f4\u5f84\u78b3\u5316\u7845\u6750\u6599\uff0c\u5e2e\u52a9\u82f1\u98de\u51cc\u5411200\u6beb\u7c73\uff088\u82f1\u5bf8\uff09\u76f4\u5f84\u6676\u5706\u7684\u8fc7\u6e21\u3002<\/p>\n

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\u6676\u76db\u673a\u7535<\/strong><\/p>\n

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\u4e09\u5b89\u5149\u7535<\/strong><\/p>\n

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