{"id":66112,"date":"2023-11-10T17:07:05","date_gmt":"2023-11-10T09:07:05","guid":{"rendered":"https:\/\/www.cnledw.com\/?p=66112"},"modified":"2023-11-10T17:07:05","modified_gmt":"2023-11-10T09:07:05","slug":"%e5%8e%a6%e9%97%a8%e5%a4%a7%e5%ad%a6%e5%8f%91%e8%a1%a8%e7%bb%bf%e5%85%89gan%e5%9f%bavcsel%e9%87%8d%e8%a6%81%e6%88%90%e6%9e%9c","status":"publish","type":"post","link":"https:\/\/www.cnledw.com\/Opto\/newsdetail-66112.html","title":{"rendered":"\u53a6\u95e8\u5927\u5b66\u53d1\u8868\u7eff\u5149GaN\u57faVCSEL\u91cd\u8981\u6210\u679c"},"content":{"rendered":"

\u8fd1\u65e5\uff0c\u5b66\u9662\u5f20\u4fdd\u5e73\u6559\u6388\u7b49\u5728\u6c2e\u5316\u9553\u5782\u76f4\u8154\u9762\u53d1\u5c04\u6fc0\u5149\u5668(GaN\u57faVCSEL)\u65b9\u9762\u53d6\u5f97\u65b0\u8fdb\u5c55\uff0c\u76f8\u5173\u6210\u679c\u4ee5\u201cGreen Vertical-Cavity Surface-Emitting Lasers Based on InGaN Quantum Dots and Short Cavity\u201d\u4e3a\u9898\u53d1\u8868\u4e8e\u671f\u520aNano-Micro Letters\u3002<\/p>\n

\u7814\u7a76\u80cc\u666f<\/strong><\/p>\n

VCSEL\u7531\u4e8e\u5176\u5177\u6709\u5706\u5f62\u5149\u675f\u3001\u5c3a\u5bf8\u5c0f\u3001\u9608\u503c\u4f4e\u3001\u6613\u4e8e\u96c6\u6210\u7b49\u7279\u70b9\u800c\u5907\u53d7\u5173\u6ce8\uff0c\u7ea2\u5916\u6ce2\u6bb5GaAs\u57faVCSEL\u5df2\u7ecf\u88ab\u5e7f\u6cdb\u7528\u4e8e\u6570\u636e\u901a\u4fe1\u30013D\u8bc6\u522b\u548c\u6fc0\u5149\u96f7\u8fbe\u7b49\u9886\u57df\u3002\u5728\u53ef\u89c1\u5149\u6ce2\u6bb5\uff0cGaN\u57faVCSEL\u5728\u663e\u793a\u3001\u53ef\u89c1\u5149\u901a\u4fe1\u548c\u751f\u7269\u533b\u7597\u7b49\u65b9\u9762\u6709\u6781\u5927\u7684\u6f5c\u5728\u5e94\u7528\uff0c\u56e0\u800c\u6210\u4e3aGaN\u5149\u7535\u5b50\u5668\u4ef6\u7684\u7814\u7a76\u70ed\u70b9\uff0c\u591a\u4e2a\u8de8\u56fd\u4f01\u4e1a\uff08\u5982\u7d22\u5c3c\u3001\u65e5\u4e9a\u3001\u65af\u5766\u96f7\u7535\u6c14\u7b49\uff09\u548c\u8457\u540d\u79d1\u5b66\u5bb6\uff08\u5982\u8bfa\u8d1d\u5c14\u5956\u83b7\u5f97\u8005Nakamura\u6559\u6388\u548cAkasaki\u6559\u6388\u7b49\uff09\u90fd\u6295\u5165\u5230GaN\u57faVCSEL\u7684\u5f00\u53d1\u7814\u7a76\u3002<\/p>\n

\u76ee\u524d\uff0cGaN\u57faVCSEL\u901a\u5e38\u4f7f\u7528InGaN \u91cf\u5b50\u9631(QW)\u4f5c\u4e3a\u6709\u6e90\u533a\u3002\u82e5\u8981\u5b9e\u73b0\u7eff\u5149VCSEL\u6fc0\u5c04\uff0c\u9700\u8981\u63d0\u9ad8QW\u7684In\u7ec4\u5206\uff0c\u4f46\u9ad8In\u7ec4\u5206\u5c06\u5e26\u6765\u5f88\u5f3a\u7684\u91cf\u5b50\u9650\u5236\u65af\u5854\u514b\u6548\u5e94(QCSE)\u548c\u9ad8\u7f3a\u9677\u5bc6\u5ea6\uff0c\u4f7fQW\u53d1\u5149\u6548\u7387\u4e0b\u964d\uff0c\u96be\u4ee5\u5b9e\u73b0\u7eff\u5149VCSEL\u6fc0\u5c04\u3002<\/p>\n

\"\"
<\/figcaption><\/figure>\n

\u7535\u6ce8\u5165GaN\u57faVCSEL\u7684 (a)\u7ed3\u6784\u793a\u610f\u56fe(b)FIB-SEM\u56fe(c)\u7535\u6ce8\u5165EL\u5149\u8c31(d)PI\u66f2\u7ebf; (e)\u56fd\u5185\u5916GaN\u57fa\u7eff\u5149VCSEL\u9608\u503c\u7535\u6d41\u5bc6\u5ea6\u4e0e\u6ce2\u957f\u7684\u5bf9\u5e94\u5173\u7cfb\u56fe<\/p>\n

\u7814\u7a76\u5185\u5bb9<\/strong><\/p>\n

\u5728\u672c\u5de5\u4f5c\u4e2d\uff0c\u4f7f\u7528S-K\u6a21\u5f0f\u4e0b\u8fdb\u884c\u751f\u957f\u7684InGaN\u91cf\u5b50\u70b9(QD)\u4f5c\u4e3a\u6709\u6e90\u533a\uff0c\u6709\u6548\u51cf\u5c0f\u6781\u5316\u7535\u573a\u5e76\u63d0\u9ad8\u53d1\u5149\u6548\u7387\uff0c\u5b9e\u73b0\u4e86\u7eff\u8272GaN\u57faVCSEL\u5728\u8fde\u7eed\u7535\u6d41\u6ce8\u5165\u4e0b\u7684\u5ba4\u6e29\u6700\u4f4e\u9608\u503c\u6fc0\u5c04\uff0c\u9608\u503c\u7535\u6d41\u5bc6\u5ea6\u4ec5\u4e3a51.97 A\/cm2\uff0c\u6fc0\u5c04\u6ce2\u957f\u4e3a524.0 nm\u3002\u6240\u4f7f\u7528\u7684\u81ea\u7ec4\u88c5InGaN QD\u5916\u5ef6\u7247\uff0c\u5176\u9ad8IQE\u4ee5\u53ca\u7c7b\u03b4\u51fd\u6570\u7684\u6001\u5bc6\u5ea6\u662f\u5b9e\u73b0\u4f4e\u9608\u503c\u7535\u6d41\u7684\u5173\u952e\u3002<\/p>\n

\u6b64\u5916\uff0c\u5668\u4ef6\u7684\u77ed\u8154(~4.0 \u03bb)\u5c06\u81ea\u53d1\u8f90\u5c04\u8026\u5408\u56e0\u5b50\u63d0\u9ad8\u52300.094\uff0c\u589e\u52a0\u4e86\u589e\u76ca\u7cfb\u6570\uff0c\u5e76\u6709\u6548\u964d\u4f4e\u4e86\u5149\u635f\u8017\u3002VCSEL\u4e2d\u7684AlN\u7535\u6d41\u9650\u5236\u5c42\u548c\u7535\u9540\u94dc\u652f\u6491\u57fa\u677f\u6709\u6548\u63d0\u9ad8\u4e86\u5668\u4ef6\u7684\u6563\u70ed\u6027\u80fd\u3002\u4e0a\u8ff0\u7814\u7a76\u7ed3\u679c\u4e3a\u5b9e\u73b0\u9ad8\u6027\u80fdGaN\u57faVCSEL\u63d0\u4f9b\u4e86\u91cd\u8981\u7684\u57fa\u7840\u3002<\/p>\n

\u7814\u7a76\u76f8\u5173<\/strong><\/p>\n

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\u8bfe\u9898\u7ec4\u957f\u671f\u8fdb\u884cGaN\u57fa\u53d1\u5149\u5668\u4ef6\u5982\u8c10\u632f\u8154LED (RCLED)\u3001Micro-LED\u3001\u4ee5\u53caVCSEL\u7814\u7a76\uff0c\u76ee\u524d\u5df2\u6210\u529f\u5b9e\u73b0\u84dd\u7d2b\u5149\u3001\u84dd\u5149\u3001\u7eff\u5149\u5668\u4ef6\u7684\u7535\u6ce8\u5165\u6fc0\u5c04\uff0c\u5e76\u4e14\u5728\u56fd\u9645\u4e0a\u9996\u6b21\u5b9e\u73b0\u4e86\u6df1\u7d2b\u5916\u6ce2\u6bb5\uff08UVC\uff09VCSEL\u7684\u5149\u6cf5\u6d66\u6fc0\u5c04\u3002\u8be5\u9879\u5de5\u4f5c\u5f97\u5230\u4e86\u56fd\u5bb6\u81ea\u7136\u79d1\u5b66\u57fa\u91d1\u4ee5\u53ca\u56fd\u5bb6\u91cd\u70b9\u7814\u53d1\u8ba1\u5212\u91cd\u70b9\u4e13\u9879\u7684\u8d44\u52a9\u3002\uff08\u6765\u6e90\uff1a\u53a6\u95e8\u5927\u5b66\u7535\u5b50\u79d1\u5b66\u4e0e\u6280\u672f\u5b66\u9662\uff09<\/p>\n

\u66f4\u591aSiC\u548cGaN\u7684\u5e02\u573a\u8d44\u8baf\uff0c\u8bf7\u5173\u6ce8\u5fae\u4fe1\u516c\u4f17\u8d26\u53f7\uff1a\u96c6\u90a6\u5316\u5408\u7269\u534a\u5bfc\u4f53\u3002<\/strong><\/p>\n","protected":false},"excerpt":{"rendered":"

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