{"id":66497,"date":"2023-12-11T17:41:49","date_gmt":"2023-12-11T09:41:49","guid":{"rendered":"https:\/\/www.cnledw.com\/?p=66497"},"modified":"2023-12-11T16:42:56","modified_gmt":"2023-12-11T08:42:56","slug":"%e4%b8%ad%e7%a7%91%e9%87%8d%e4%bb%aa%e8%87%aa%e7%a0%94%e5%8a%9f%e7%8e%87%e5%9e%8bgan-on-si%e7%94%9f%e4%ba%a7%e7%ba%bf%e6%8a%95%e4%ba%a7","status":"publish","type":"post","link":"https:\/\/www.cnledw.com\/power\/newsdetail-66497.html","title":{"rendered":"\u4e2d\u79d1\u91cd\u4eea\u81ea\u7814\u529f\u7387\u578bGaN-on-Si\u751f\u4ea7\u7ebf\u6295\u4ea7"},"content":{"rendered":"

\u8fd1\u65e5\uff0c\u82cf\u5dde\u4e2d\u79d1\u91cd\u4eea\u534a\u5bfc\u4f53\u6750\u6599\u6709\u9650\u516c\u53f8\uff08\u4ee5\u4e0b\u7b80\u79f0\u4e2d\u79d1\u91cd\u4eea\uff09\u81ea\u4e3b\u7814\u53d1\u7684\u5e94\u7528\u4e8e\u7535\u529b\u7535\u5b50\u9886\u57df\u7684\u5927\u5c3a\u5bf8\u7845\u57fa\u6c2e\u5316\u9553\uff08GaN-on-Si\uff09\u5916\u5ef6\u7247\u751f\u4ea7\u7ebf\u6b63\u5f0f\u5efa\u6210\u5e76\u6295\u5165\u4f7f\u7528\u3002<\/p>\n

\u636e\u4ecb\u7ecd\uff0c\u76ee\u524dGaN\u6750\u6599\u5916\u5ef6\u751f\u957f\u7684\u4e3b\u6d41\u65b9\u6cd5\u662f\u91d1\u5c5e\u6709\u673a\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u6cd5\uff08MOCVD\uff09\uff0c\u7531\u4e8e\u9488\u5bf9\u529f\u7387\u578b\u5927\u5c3a\u5bf8GaN-on-Si\u6750\u6599\u751f\u4ea7\u7684\u4e13\u7528MOCVD\u8bbe\u5907\u6280\u672f\u542b\u91cf\u9ad8\uff0c\u53ea\u6709\u5fb7\u65e5\u7b49\u5c11\u6570\u53d1\u8fbe\u56fd\u5bb6\u638c\u63e1\u8be5\u9879\u6280\u672f\uff0c\u56e0\u6b64\u56fd\u5185\u7535\u529b\u7535\u5b50\u65b9\u5411\u7684\u4e13\u7528MOCVD\u8bbe\u5907\u4e3b\u8981\u4f9d\u8d56\u8fdb\u53e3\uff0c\u5173\u952e\u6280\u672f\u53d7\u5236\u4e8e\u4eba\u3002<\/p>\n

\u800c\u4e2d\u79d1\u91cd\u4eea\u81ea\u4e3b\u7814\u53d1\u7684\u7535\u529b\u7535\u5b50\u65b9\u5411GaN-on-Si\u5916\u5ef6\u7247\u751f\u4ea7\u7ebf\u5177\u6709\u6c14\u6e90\u9884\u5904\u7406\u529f\u80fd\uff0c\u6838\u5fc3\u53cd\u5e94\u8154\u5185\u5bf9\u6e29\u573a\u3001\u6d41\u573a\u5747\u5300\u6027\u5f3a\u5316\u63a7\u5236\uff0c\u52a0\u5165\u5e94\u529b\u7fd8\u66f2\u6a21\u578b\uff0c\u66f4\u52a0\u9002\u5408\u5927\u5c3a\u5bf8GaN\u6750\u6599\u751f\u957f\uff0c\u53ef\u4ee5\u6ee1\u8db3\u7535\u529b\u7535\u5b50\u9886\u57df\u529f\u7387\u5668\u4ef6\u5f00\u53d1\u4e0e\u5e94\u7528\u9700\u6c42\uff0c\u6709\u52a9\u4e8e\u5b9e\u73b0\u56fd\u4ea7\u66ff\u4ee3\u3002<\/p>\n

\"\"<\/figure>\n

\u56fe\u7247\u6765\u6e90\uff1a\u62cd\u4fe1\u7f51\u6b63\u7248\u56fe\u5e93<\/p>\n

\u6027\u80fd\u65b9\u9762\uff0c\u636e\u4ecb\u7ecd\uff0c\u4e2d\u79d1\u91cd\u4eea\u751f\u4ea7\u7684GaN\u5916\u5ef6\u7247\uff0cGaN\u5c42\u539a\u5ea6\u7ea65\u03bcm\u8868\u9762\u65e0\u88c2\u7eb9\uff0c\u7fd8\u66f2\u5ea6\u5c0f\u4e8e100\u03bcm\u3002HEMT\u7ed3\u6784\u5ba4\u6e29\u4e0b\uff0c\u65b9\u5757\u7535\u963b\u4e3a465\u03a9\/sq\uff0c\u4e8c\u7ef4\u7535\u5b50\u6c14\uff082DEG\uff09\u6d53\u5ea6\u7ea68\u00d71013cm-2\u30012DEG\u8fc1\u79fb\u7387\u5927\u4e8e2000cm2\/Vs\uff0c\u7247\u5185\u4e0e\u7247\u95f4\u4e0d\u5747\u5300\u6027\u5c0f\u4e8e1%\u3002<\/p>\n

\u636e\u6089\uff0c\u65e9\u57281990\u5e74\uff0c\u4e2d\u79d1\u91cd\u4eea\u7684\u6280\u672f\u56e2\u961f\u5c31\u6295\u8eab\u4e8eGaN\u9886\u57df\uff1b2015\u5e74\uff0c\u56e2\u961f\u63d0\u51fa\u4e86\u7528\u4e8e\u5927\u5c3a\u5bf8\u5916\u5ef6\u7247\u5e94\u529b\u7fd8\u66f2\u8bc4\u4f30\u7684\u201cYao\u6a21\u578b\u201d\uff0c\u6709\u6548\u63d0\u5347GaN\u5916\u5ef6\u751f\u4ea7\u826f\u7387\uff1b2018\u5e74\uff0c\u56e2\u961f\u627f\u62c5\u8d77\u5782\u76f4\u7ed3\u6784GaN\u7535\u529b\u7535\u5b50\u5668\u4ef6\u7814\u5236\u7684\u56fd\u5bb6\u81ea\u7136\u79d1\u5b66\u57fa\u91d1\u8bfe\u9898\uff1b2021\u5e74\uff0c\u56e2\u961f\u6210\u529f\u7814\u5236\u51fa\u56fd\u4ea7\u5316\u4e2d\u8bd5\u578b\u7535\u529b\u7535\u5b50\u65b9\u5411\u4e13\u7528MOCVD\u8bbe\u5907\uff0c\u5e76\u53ef\u4ee5\u7a33\u5b9a\u8fdb\u884c\u5927\u5c3a\u5bf8GaN-on-Si\u5916\u5ef6\u6750\u6599\u751f\u957f\uff1b2023\u5e74\u4e2d\u79d1\u91cd\u4eea\u5728\u82cf\u5dde\u5434\u6c5f\u533a\u5efa\u7acb\u4e86\u56fd\u5185\u9996\u6761\u91c7\u7528\u56fd\u4ea7\u5316MOCVD\u8bbe\u5907\u751f\u4ea7\u76848\u82f1\u5bf8GaN-on-Si\u5916\u5ef6\u4ea7\u7ebf\uff0c\u5355\u6761\u4ea7\u7ebf\u5e74\u4ea7\u80fd\u8fbe5000\u7247\u3002<\/p>\n

\u8fd1\u671f\uff0c\u6c2e\u5316\u9553\u5916\u5ef6\u6750\u6599\u9886\u57df\u4e0d\u65ad\u4f20\u51fa\u5229\u597d\u6d88\u606f\u3002\u5728\u4e2d\u79d1\u91cd\u4eeaGaN-on-Si\u751f\u4ea7\u7ebf\u6295\u4ea7\u7684\u540c\u65f6\uff0cGaN\u5916\u5ef6\u4f01\u4e1a\u6676\u6e5b\u534a\u5bfc\u4f53\u5ba3\u5e03\u5b8c\u6210\u6570\u4ebf\u5143C+\u8f6e\u878d\u8d44\u3002\u8fd9\u662f\u6676\u6e5b\u534a\u5bfc\u4f53\u7ee72022\u5e74\u5b8c\u62102\u8f6e\u6570\u4ebf\u5143\u878d\u8d44\u4ee5\u6765\u7684\u65b0\u878d\u8d44\u8fdb\u5c55\uff0c\u6676\u6e5b\u534a\u5bfc\u4f53\u672c\u8f6e\u878d\u8d44\u7684\u6295\u8d44\u65b9\u5305\u62ec\u5c1a\u9880\u8d44\u672c\u3001\u4e0a\u6c7d\u96c6\u56e2\u6218\u7565\u76f4\u6295\u57fa\u91d1\u3001\u851a\u6765\u8d44\u672c\u3001\u6c47\u8a89\u6295\u8d44\u3001\u65b0\u5c1a\u8d44\u672c\u3001\u8054\u884c\u8d44\u4ea7\u3001\u5408\u80a5\u5efa\u6295\u8d44\u672c\u3001\u7c73\u54c8\u6e38\u3001\u4eac\u94ed\u8d44\u672c\u7b49\u4f17\u591a\u673a\u6784\uff0c\u5404\u6295\u8d44\u65b9\u770b\u597d\u6676\u6e5b\u534a\u5bfc\u4f53\u53ca\u5176\u80cc\u540eGaN\u5916\u5ef6\u8d5b\u9053\u53d1\u5c55\u6f5c\u529b\u3002\uff08\u96c6\u90a6\u5316\u5408\u7269\u534a\u5bfc\u4f53Zac\u6574\u7406\uff09<\/p>\n

\u66f4\u591aSiC\u548cGaN\u7684\u5e02\u573a\u8d44\u8baf\uff0c\u8bf7\u5173\u6ce8\u5fae\u4fe1\u516c\u4f17\u8d26\u53f7\uff1a\u96c6\u90a6\u5316\u5408\u7269\u534a\u5bfc\u4f53\u3002<\/strong><\/p>\n","protected":false},"excerpt":{"rendered":"

\u8fd1\u65e5\uff0c\u82cf\u5dde\u4e2d\u79d1\u91cd\u4eea\u534a\u5bfc\u4f53\u6750\u6599\u6709\u9650\u516c\u53f8\uff08\u4ee5\u4e0b\u7b80\u79f0\u4e2d\u79d1\u91cd\u4eea\uff09\u81ea\u4e3b\u7814\u53d1\u7684\u5e94\u7528\u4e8e\u7535\u529b\u7535\u5b50\u9886\u57df\u7684\u5927\u5c3a\u5bf8\u7845\u57fa\u6c2e\u5316\u9553\uff08GaN […]<\/p>\n","protected":false},"author":118,"featured_media":0,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[1233],"tags":[994,1417],"_links":{"self":[{"href":"https:\/\/www.cnledw.com\/wp-json\/wp\/v2\/posts\/66497"}],"collection":[{"href":"https:\/\/www.cnledw.com\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.cnledw.com\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.cnledw.com\/wp-json\/wp\/v2\/users\/118"}],"replies":[{"embeddable":true,"href":"https:\/\/www.cnledw.com\/wp-json\/wp\/v2\/comments?post=66497"}],"version-history":[{"count":1,"href":"https:\/\/www.cnledw.com\/wp-json\/wp\/v2\/posts\/66497\/revisions"}],"predecessor-version":[{"id":66498,"href":"https:\/\/www.cnledw.com\/wp-json\/wp\/v2\/posts\/66497\/revisions\/66498"}],"wp:attachment":[{"href":"https:\/\/www.cnledw.com\/wp-json\/wp\/v2\/media?parent=66497"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.cnledw.com\/wp-json\/wp\/v2\/categories?post=66497"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.cnledw.com\/wp-json\/wp\/v2\/tags?post=66497"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}