{"id":67652,"date":"2024-04-07T18:20:17","date_gmt":"2024-04-07T10:20:17","guid":{"rendered":"https:\/\/www.cnledw.com\/?p=67652"},"modified":"2024-04-07T17:37:37","modified_gmt":"2024-04-07T09:37:37","slug":"%e5%bc%80%e5%8f%91%e7%a2%b3%e5%8c%96%e7%a1%85%e6%9d%90%e6%96%99%e6%b7%b1%e5%88%bb%e8%9a%80%e8%ae%be%e5%a4%87%ef%bc%8c%e4%b8%ad%e9%94%83%e5%8d%8a%e5%af%bc%e4%bd%93%e5%ae%8c%e6%88%90%e6%95%b0%e5%8d%83","status":"publish","type":"post","link":"https:\/\/www.cnledw.com\/Company\/newsdetail-67652.html","title":{"rendered":"\u5f00\u53d1\u78b3\u5316\u7845\u6750\u6599\u6df1\u523b\u8680\u8bbe\u5907\uff0c\u4e2d\u9503\u534a\u5bfc\u4f53\u5b8c\u6210\u6570\u5343\u4e07\u878d\u8d44"},"content":{"rendered":"

2024\u5e74\u4ee5\u6765\uff0cSiC\u4ea7\u4e1a\u94fe\u6295\u878d\u8d44\u6301\u7eed\u706b\u70ed\uff0c\u8fd1\u671f\u53c8\u6709\u4e00\u5bb6\u5382\u5546\u53d7\u5230\u8d44\u672c\u5e02\u573a\u9752\u7750\uff0c\u5f00\u542f\u4e86\u878d\u8d44\u5927\u95e8\u3002<\/p>\n

\u8fd1\u65e5\uff0c\u4e2d\u9503\u534a\u5bfc\u4f53\uff08\u6df1\u5733\uff09\u6709\u9650\u516c\u53f8\uff08\u4ee5\u4e0b\u7b80\u79f0\u4e2d\u9503\u534a\u5bfc\u4f53\uff09\u5b8c\u6210\u6570\u5343\u4e07\u5143\u4eba\u6c11\u5e01\u5929\u4f7f\u8f6e\u878d\u8d44\u3002\u672c\u8f6e\u878d\u8d44\u7531\u56fd\u79d1\u4eac\u4e1c\u65b9\u3001\u56fd\u6838\u66dc\u80fd\u3001\u671b\u4f17\u6295\u8d44\u7b49\u5171\u540c\u51fa\u8d44\uff0c\u5c06\u4e3b\u8981\u7528\u4e8e\u7814\u53d1\u5e73\u53f0\u642d\u5efa\u3001\u539f\u578b\u8bbe\u5907\u548c\u6838\u5fc3\u5de5\u827a\u5f00\u53d1\u7b49\u65b9\u9762\u3002<\/p>\n

\"\"
<\/figcaption><\/figure>\n

\u56fe\u7247\u6765\u6e90\uff1a\u62cd\u4fe1\u7f51\u6b63\u7248\u56fe\u5e93<\/p>\n

\u4e2d\u9503\u534a\u5bfc\u4f53\u5251\u6307SiC\u6280\u672f\u7a81\u7834<\/strong><\/p>\n

\u4f5c\u4e3a\u4e00\u5bb6\u6210\u7acb\u4e8e2023\u5e7410\u6708\u7684\u521d\u521b\u4f01\u4e1a\uff0c\u4e2d\u9503\u534a\u5bfc\u4f53\u5df2\u5728\u8bbe\u5907\u7814\u53d1\u5236\u9020\u3001\u5de5\u827a\u7b49\u65b9\u9762\u79ef\u7d2f\u4e86\u4e00\u5b9a\u7684\u7ecf\u9a8c\u548c\u6280\u672f\u3002\u76ee\u524d\uff0c\u4e2d\u9503\u534a\u5bfc\u4f53\u6b63\u5168\u529b\u5f00\u53d1\u9488\u5bf9SiC\u6750\u6599\u7684\u6df1\u523b\u8680\u8bbe\u5907\u548c\u5de5\u827a\uff08Deep SiC Etch\uff09\uff0c\u7528\u4ee5\u652f\u6301\u6c9f\u69fd\u6805\uff08Trench-Gate\uff09\u7684\u5b9e\u73b0\u548c\u66f4\u5e7f\u9614\u5668\u4ef6\u8bbe\u8ba1\u7a97\u53e3\u3002<\/p>\n

\u636e\u6089\uff0c\u901a\u8fc7\u6c9f\u69fd\u6805\u6280\u672f\uff0cSiC\u4ea7\u54c1\u53ef\u4ee5\u7f29\u5c0f\u82af\u7247\u7684\u8868\u9762\u79ef\uff0c\u8ba9\u5355\u4e2a\u6676\u5706\u80fd\u4ea7\u51fa\u66f4\u591a\u7684\u82af\u7247\u3002\u56e0\u6b64\uff0c\u8fd9\u9879\u6280\u672f\u6709\u52a9\u4e8eSiC\u4ea7\u4e1a\u964d\u672c\u589e\u6548\u3002\u9664\u4e86\u964d\u4f4e\u6210\u672c\u5916\uff0c\u6c9f\u69fd\u6805\u8fd8\u53ef\u4ee5\u907f\u514d\u5bc4\u751fJfet\u6548\u5e94\u5e26\u6765\u7684\u989d\u5916\u5185\u963b\u3002\u6bd4\u5982\uff0c\u82f1\u98de\u51cc\u5c31\u66fe\u901a\u8fc7\u6c9f\u69fd\uff0c\u6765\u9009\u62e9\u66f4\u597d\u6676\u9762\u8fdb\u800c\u6539\u5584\u6805\u6c27\u754c\u9762\u548c\u63d0\u9ad8\u5668\u4ef6\u6027\u80fd\u7b49\u3002<\/p>\n

\u76ee\u524d\uff0c\u5982\u4f55\u5e94\u5bf9SiC\u8d85\u9ad8\u786c\u5ea6\u7b49\u6750\u6599\u7279\u6027\uff0c\u5b9e\u73b0SiC\u6df1\u523b\u8680\u4ee5\u9ad8\u6548\u5730\u5b9e\u73b0\u6c9f\u69fd\u6805\u6280\u672f\u7b49\u5de5\u827a\u7684\u5177\u4f53\u5f62\u8c8c\u8981\u6c42\uff0c\u5df2\u6210\u4e3a\u4ea7\u4e1a\u754c\u5173\u6ce8\u7684\u7126\u70b9\u95ee\u9898\u3002<\/p>\n

\u5728\u672c\u571f\u8bbe\u5907\u5382\u5546\u4e2d\u9503\u534a\u5bfc\u4f53\u9488\u5bf9SiC\u6750\u6599\u7684\u6df1\u523b\u8680\u8bbe\u5907\u548c\u5de5\u827a\u652f\u6301\u4e0b\uff0c\u56fd\u5185SiC\u5382\u5546\u6709\u671b\u52a0\u901f\u5b9e\u73b0SiC\u6df1\u523b\u8680\u6280\u672f\u7a81\u7834\uff0c\u8fdb\u800c\u63a8\u52a8\u6c9f\u69fd\u578bSiC\u5668\u4ef6\u7814\u53d1\u548c\u91cf\u4ea7\uff0c\u6700\u7ec8\u5171\u540c\u5b9e\u73b0\u5728SiC\u6280\u672f\u65b9\u9762\u7684\u201c\u5f2f\u9053\u8d85\u8f66\u201d\u3002<\/p>\n

\u636e\u4e86\u89e3\uff0c\u4e2d\u9503\u534a\u5bfc\u4f53\u672a\u6765\u8fd8\u5c06\u8054\u5408\u4ea7\u4e1a\u4f19\u4f34\u7814\u53d1\u5148\u8fdb\u7684\u7b49\u79bb\u5b50\u4f53\u5e72\u6cd5\u523b\u8680\u8bbe\u5907\u548c\u201cSiC\uff0dTrench\uff0dEtch\u201d\u7684\u5de5\u827a\u89e3\u51b3\u65b9\u6848\uff0c\u5e2e\u52a9\u5ba2\u6237\u5b9e\u73b0\u5de5\u827a\u7684\u843d\u5730\u3001\u91cf\u4ea7\u548c\u826f\u7387\u63d0\u5347\uff0c\u5e76\u81f4\u529b\u4e8e\u5c06\u201c\u7b49\u79bb\u5b50\u4f53\u5e72\u6cd5\u523b\u8680\u6280\u672f\uff08Plasma Dry Etch\uff09\u201d\u63a8\u5e7f\u5230\u66f4\u591a\u5e94\u7528\u9886\u57df\u3002\u672a\u6765\uff0c\u968f\u7740\u8fd9\u4e9b\u6280\u672f\u548c\u8bbe\u5907\u843d\u5730\u5e94\u7528\uff0c\u4e5f\u6709\u671b\u63a8\u52a8\u5305\u62ecSiC\u5728\u5185\u7684\u5148\u8fdb\u534a\u5bfc\u4f53\u4ea7\u4e1a\u52a0\u901f\u53d1\u5c55\u3002<\/p>\n

\u6c9f\u69fd\u578bSiC\u5668\u4ef6\u8f6c\u578b\u8d8b\u52bf<\/strong><\/p>\n

\u4e2d\u9503\u534a\u5bfc\u4f53\u7684SiC\u6750\u6599\u6df1\u523b\u8680\u8bbe\u5907\u548c\u5de5\u827a\uff0c\u5bf9\u4e8e\u5b9e\u73b0\u6c9f\u69fd\u578bSiC\u5668\u4ef6\u610f\u4e49\u91cd\u5927\u3002\u8fd1\u5e74\u6765\uff0c\u56fd\u5185\u5916\u5382\u5546\u7eb7\u7eb7\u5c06\u76ee\u5149\u7784\u51c6\u4e86\u6c9f\u69fd\u6805SiC MOSFET\uff0c\u6df1\u523b\u8680\u8bbe\u5907\u548c\u5de5\u827a\u6709\u671b\u5f97\u5230\u5e7f\u6cdb\u5e94\u7528\u3002<\/p>\n

\u56fd\u5185\u5382\u5546\u65b9\u9762\uff0c\u53bb\u5e7412\u6708\u5e95\uff0c\u79ef\u5854\u534a\u5bfc\u4f53\u4e0e\u5b89\u5efa\u534a\u5bfc\u4f53\u8fbe\u6210\u591a\u9879\u5408\u4f5c\uff0c\u5176\u4e2d\u5c31\u5305\u62ec\u52a0\u901f\u5b8c\u6210\u5b89\u5efa\u5728\u79ef\u5854\u4ee3\u5de5\u7684\u5e73\u9762\u578bSiC MOSFET\u5668\u4ef6\u5f00\u53d1\uff0c\u5e76\u643a\u624b\u8fc8\u8fdb\u65b0\u4e00\u4ee3\u6c9f\u69fd\u578bSiC MOSFET\u5668\u4ef6\u5f00\u53d1\u3002<\/p>\n

\u65f6\u4ee3\u7535\u6c14\u5219\u5728\u4eca\u5e742\u6708\u521d\u8868\u793a\uff0c\u5176SiC\u82af\u7247\u751f\u4ea7\u7ebf\u6280\u672f\u80fd\u529b\u63d0\u5347\u5efa\u8bbe\u9879\u76ee\u8fdb\u5c55\u987a\u5229\uff0c\u9879\u76ee\u5efa\u6210\u8fbe\u4ea7\u540e\uff0c\u80fd\u591f\u5c06\u73b0\u6709\u5e73\u9762\u6805SiC MOSFET\u82af\u7247\u6280\u672f\u80fd\u529b\u63d0\u5347\u5230\u6ee1\u8db3\u6c9f\u69fd\u6805SiC MOSFET\u82af\u7247\u7814\u53d1\u80fd\u529b\u3002<\/p>\n

\u79ef\u5854\u534a\u5bfc\u4f53\u4e0e\u5b89\u5efa\u534a\u5bfc\u4f53\u643a\u624b\u5f00\u53d1\u9879\u76ee\u7531\u5e73\u9762\u578bSiC MOSFET\u5668\u4ef6\u8f6c\u5411\u6c9f\u69fd\u578bSiC MOSFET\u5668\u4ef6\uff0c\u4ee5\u53ca\u65f6\u4ee3\u7535\u6c14\u5411\u6c9f\u69fd\u6805SiC MOSFET\u82af\u7247\u7814\u53d1\u5347\u7ea7\uff0c\u90fd\u4e0e\u6c9f\u69fd\u578bSiC MOSFET\u5668\u4ef6\u4f18\u52bf\u6709\u5173\u3002\u91cf\u4ea7\u6c9f\u69fd\u578bSiC MOSFET\u5668\u4ef6\u7684\u5382\u5546\u666e\u904d\u8ba4\u4e3a\uff0c\u76f8\u6bd4\u5e73\u9762\u578b\u7ed3\u6784\uff0c\u6c9f\u69fd\u578bSiC MOSFET\u5728\u6210\u672c\u548c\u6027\u80fd\u65b9\u9762\u90fd\u5177\u6709\u8f83\u5f3a\u4f18\u52bf\u3002<\/p>\n

\u56fd\u9645\u5382\u5546\u5f53\u4e2d\uff0c\u7f57\u59c6\u662f\u7387\u5148\u8f6c\u5411\u6c9f\u69fd\u578bSiC MOSFET\u7684\u516c\u53f8\u3002\u65e9\u57282015\u5e74\uff0c\u7f57\u59c6\u5c31\u5728\u4e16\u754c\u8303\u56f4\u5185\u7387\u5148\u5f00\u53d1\u51fa\u91c7\u7528\u6c9f\u69fd\u7ed3\u6784\u7684SiC MOSFET\u3002\u4e0e\u5df2\u7ecf\u91cf\u4ea7\u7684\u5e73\u9762\u578bSiC MOSFET\u76f8\u6bd4\uff0c\u540c\u4e00\u82af\u7247\u5c3a\u5bf8\u7684\u5bfc\u901a\u7535\u963b\u53ef\u964d\u4f4e50%\uff0c\u8fd9\u6709\u5229\u4e8e\u964d\u4f4e\u592a\u9633\u80fd\u53d1\u7535\u7528\u529f\u7387\u8c03\u8282\u5668\u548c\u5de5\u4e1a\u8bbe\u5907\u7528\u7535\u6e90\u3001\u5de5\u4e1a\u7528\u9006\u53d8\u5668\u7b49\u76f8\u5173\u8bbe\u5907\u7684\u529f\u7387\u635f\u8017\u3002<\/p>\n

\u57281992\u5e74\u5c31\u5f00\u59cb\u7814\u53d1SiC\u529f\u7387\u5668\u4ef6\u7684\u82f1\u98de\u51cc\u5e76\u6ca1\u6709\u9009\u62e9\u8fdb\u5165\u5e73\u9762\u7ed3\u6784\u5e02\u573a\uff0c\u800c\u662f\u76f4\u63a5\u9009\u62e9\u4e86\u6c9f\u69fd\u7ed3\u6784\uff0c\u5e76\u57282017\u5e74\u53d1\u5e03\u6c9f\u69fd\u578bSiC MOSFET\u3002\u6b64\u5916\uff0c\u7535\u88c5\u7684\u6c9f\u69fd\u578bSiC MOSFET\u4e5f\u5df2\u6b63\u5f0f\u5546\u7528\u3002<\/p>\n

\u672a\u6765\uff0c\u5927\u6982\u7387\u5c06\u6709\u66f4\u591a\u56fd\u5185\u5916\u5382\u5546\u8f6c\u578b\u6c9f\u69fd\u578bSiC\u5668\u4ef6\uff0c\u5bf9\u4e8e\u4e2d\u9503\u534a\u5bfc\u4f53\u7b49\u6301\u7eed\u81f4\u529b\u4e8e\u76f8\u5173\u7279\u8272\u5de5\u827a\u3001\u8bbe\u5907\u7814\u53d1\u7684\u5382\u5546\u800c\u8a00\uff0c\u4e5f\u6709\u53ef\u80fd\u83b7\u5f97\u66f4\u591a\u7684\u5408\u4f5c\u673a\u4f1a\u3002<\/p>\n

\u5c0f\u7ed3<\/strong><\/p>\n

\u4f5c\u4e3a\u4e00\u5bb6\u6210\u7acb\u4ec5\u534a\u5e74\u7684SiC\u4ea7\u4e1a\u94fe\u521b\u4f01\uff0c\u4e2d\u9503\u534a\u5bfc\u4f53\u80fd\u591f\u5728\u77ed\u65f6\u95f4\u5185\u83b7\u5f97\u6295\u8d44\u673a\u6784\u8ba4\u53ef\u5e76\u62ff\u4e0b\u9996\u8f6e\u878d\u8d44\uff0c\u4e0e\u884c\u4e1a\u70ed\u5ea6\u5c45\u9ad8\u4e0d\u4e0b\u6709\u76f4\u63a5\u5173\u7cfb\uff0c\u4e5f\u4e0e\u5176\u6280\u672f\u4eae\u70b9\u5bc6\u4e0d\u53ef\u5206\u3002<\/p>\n

SiC\u4ea7\u4e1a\u94fe\u73af\u8282\u4f17\u591a\uff0c\u5728\u5de5\u827a\u548c\u8bbe\u5907\u9886\u57df\uff0c\u9664\u4e2d\u9503\u534a\u5bfc\u4f53\u5916\uff0c\u8c26\u89c6\u667a\u80fd\u3001\u601d\u9510\u667a\u80fd\u7b49\u5382\u5546\u4e5f\u5728\u8fd1\u671f\u5b8c\u6210\u65b0\u4e00\u8f6e\u878d\u8d44\uff1b\u5728\u6750\u6599\u3001\u5668\u4ef6\u7b49\u5404\u4e2a\u65b9\u9762\uff0c\u76f8\u5173\u5382\u5546\u80fd\u591f\u53d6\u5f97\u91cd\u5927\u7a81\u7834\uff0c\u6216\u662f\u6709\u72ec\u5230\u4e4b\u5904\uff0c\u90fd\u6709\u53ef\u80fd\u6210\u4e3a\u8d44\u672c\u5e02\u573a\u201c\u5ba0\u513f\u201d\u3002\uff08\u6587\uff1a\u96c6\u90a6\u5316\u5408\u7269\u534a\u5bfc\u4f53Zac\uff09<\/p>\n

\u66f4\u591aSiC\u548cGaN\u7684\u5e02\u573a\u8d44\u8baf\uff0c\u8bf7\u5173\u6ce8\u5fae\u4fe1\u516c\u4f17\u8d26\u53f7\uff1a\u96c6\u90a6\u5316\u5408\u7269\u534a\u5bfc\u4f53\u3002<\/strong><\/p>\n","protected":false},"excerpt":{"rendered":"

2024\u5e74\u4ee5\u6765\uff0cSiC\u4ea7\u4e1a\u94fe\u6295\u878d\u8d44\u6301\u7eed\u706b\u70ed\uff0c\u8fd1\u671f\u53c8\u6709\u4e00\u5bb6\u5382\u5546\u53d7\u5230\u8d44\u672c\u5e02\u573a\u9752\u7750\uff0c\u5f00\u542f\u4e86\u878d\u8d44\u5927\u95e8\u3002 \u8fd1\u65e5\uff0c\u4e2d\u9503\u534a\u5bfc […]<\/p>\n","protected":false},"author":130,"featured_media":0,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[1265],"tags":[1538,64],"_links":{"self":[{"href":"https:\/\/www.cnledw.com\/wp-json\/wp\/v2\/posts\/67652"}],"collection":[{"href":"https:\/\/www.cnledw.com\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.cnledw.com\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.cnledw.com\/wp-json\/wp\/v2\/users\/130"}],"replies":[{"embeddable":true,"href":"https:\/\/www.cnledw.com\/wp-json\/wp\/v2\/comments?post=67652"}],"version-history":[{"count":1,"href":"https:\/\/www.cnledw.com\/wp-json\/wp\/v2\/posts\/67652\/revisions"}],"predecessor-version":[{"id":67654,"href":"https:\/\/www.cnledw.com\/wp-json\/wp\/v2\/posts\/67652\/revisions\/67654"}],"wp:attachment":[{"href":"https:\/\/www.cnledw.com\/wp-json\/wp\/v2\/media?parent=67652"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.cnledw.com\/wp-json\/wp\/v2\/categories?post=67652"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.cnledw.com\/wp-json\/wp\/v2\/tags?post=67652"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}