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\"12\u5bb6\u4f01\u4e1aQ3\u4e1a\u7ee9\u6c47\u603b\"
<\/figcaption><\/figure>\n

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10\u670828\u65e5\u665a\u95f4\uff0c\u65b0\u6d01\u80fd\u53d1\u5e03\u4e862024\u5e74\u7b2c\u4e09\u5b63\u5ea6\u62a5\u544a\u3002\u65b0\u6d01\u80fdQ3\u5b9e\u73b0\u8425\u65364.82\u4ebf\u5143\uff0c\u540c\u6bd4\u589e\u957f39.45%\uff1b\u5f52\u6bcd\u51c0\u5229\u6da61.15\u4ebf\u5143\uff0c\u540c\u6bd4\u589e\u957f70.27%\uff1b\u5f52\u6bcd\u6263\u975e\u51c0\u5229\u6da61.11\u4ebf\u5143\uff0c\u540c\u6bd4\u589e\u957f73.76%\u3002<\/p>\n

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\u5728\u5316\u5408\u7269\u534a\u5bfc\u4f53\u9886\u57df\uff0c\u65b0\u6d01\u80fd\u7684\u78b3\u5316\u7845MOSFET\u90e8\u5206\u4ea7\u54c1\u5df2\u901a\u8fc7\u5ba2\u6237\u9a8c\u8bc1\u5e76\u5b9e\u73b0\u5c0f\u89c4\u6a21\u9500\u552e\uff0c\u6c2e\u5316\u9553HEMT\u90e8\u5206\u4ea7\u54c1\u5df2\u5f00\u53d1\u5b8c\u6210\u5e76\u901a\u8fc7\u53ef\u9760\u6027\u6d4b\u8bd5\u3002<\/p>\n

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\u5728\u529f\u7387\u5668\u4ef6\u9886\u57df\uff0c\u82af\u5bfc\u79d1\u6280\u9488\u5bf9GaN HEMT\u4ea7\u54c1\u5f00\u53d1\u4e86\u9ad8\u538bP-GaN HEMT\u6280\u672f\u5e73\u53f0\u3002\u5728\u65b0\u80fd\u6e90\u5e94\u7528\u573a\u666f\uff0c\u82af\u5bfc\u79d1\u6280\u575a\u6301GaN\u76f8\u5173\u5668\u4ef6\u53ca\u9a71\u52a8\u63a7\u5236\u5668\u7684\u5f00\u53d1\uff0c\u9ad8\u6574\u5408\u5ea6\u9a71\u52a8\u5668\u82af\u7247\u5df2\u5728\u5ba2\u6237\u7aef\u5b8c\u6210\u9a8c\u8bc1\uff0c\u5e76\u5b9e\u73b0\u5c0f\u6279\u91cf\u51fa\u8d27\u3002<\/p>\n

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10\u670828\u65e5\u665a\u95f4\uff0c\u7acb\u6602\u5fae\u53d1\u5e03\u4e862024\u5e74\u7b2c\u4e09\u5b63\u5ea6\u62a5\u544a\u3002\u7acb\u6602\u5faeQ3\u5b9e\u73b0\u8425\u65368.18\u4ebf\u5143\uff0c\u540c\u6bd4\u589e\u957f21.94%\uff1b\u5f52\u6bcd\u51c0\u5229\u6da60.13\u4ebf\u5143\uff0c\u540c\u6bd4\u589e\u957f6.63%\uff1b\u5f52\u6bcd\u6263\u975e\u51c0\u5229\u6da60.06\u4ebf\u5143\uff0c\u540c\u6bd4\u4e0b\u6ed147.75%\u3002<\/p>\n

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2024\u5e74\u7b2c\u4e09\u5b63\u5ea6\uff0c\u7acb\u6602\u5fae\u534a\u5bfc\u4f53\u529f\u7387\u5668\u4ef6\u82af\u7247\u9500\u91cf40.64\u4e07\u7247\uff0c\u540c\u6bd4\u4e0b\u964d5.11%\uff0c\u73af\u6bd4\u4e0b\u964d15.84%\uff1b\u5316\u5408\u7269\u534a\u5bfc\u4f53\u5c04\u9891\u82af\u7247\u9500\u91cf0.96\u4e07\u7247\uff0c\u540c\u6bd4\u589e\u957f111.34%\uff0c\u73af\u6bd4\u589e\u957f11.20%\u3002<\/p>\n

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10\u670828\u65e5\u665a\u95f4\uff0c\u5747\u80dc\u7535\u5b50\u53d1\u5e03\u4e862024\u5e74\u7b2c\u4e09\u5b63\u5ea6\u62a5\u544a\u3002\u5747\u80dc\u7535\u5b50Q3\u5b9e\u73b0\u8425\u6536140.56\u4ebf\u5143\uff0c\u540c\u6bd4\u4e0b\u6ed11.68%\uff1b\u5f52\u6bcd\u51c0\u5229\u6da63.05\u4ebf\u5143\uff0c\u540c\u6bd4\u589e\u957f0.50%\uff1b\u5f52\u6bcd\u6263\u975e\u51c0\u5229\u6da63.03\u4ebf\u5143\uff0c\u540c\u6bd4\u589e\u957f10.09%\u3002<\/p>\n

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10\u670828\u65e5\u665a\u95f4\uff0c\u6676\u5347\u80a1\u4efd\u53d1\u5e03\u4e862024\u5e74\u7b2c\u4e09\u5b63\u5ea6\u62a5\u544a\u3002\u6676\u5347\u80a1\u4efdQ3\u5b9e\u73b0\u8425\u65361.27\u4ebf\u5143\uff0c\u540c\u6bd4\u589e\u957f0.97%\uff1b\u5f52\u6bcd\u51c0\u5229\u6da60.19\u4ebf\u5143\uff0c\u540c\u6bd4\u4e0b\u6ed131.57%\uff1b\u5f52\u6bcd\u6263\u975e\u51c0\u5229\u6da60.09\u4ebf\u5143\uff0c\u540c\u6bd4\u4e0b\u6ed153.89%\u3002<\/p>\n

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8\u67087\u65e5\uff0c\u6676\u5347\u80a1\u4efd\u5728\u6295\u8d44\u8005\u4e92\u52a8\u5e73\u53f0\u8868\u793a\uff0c\u5176\u7b2c\u4e00\u62798\u82f1\u5bf8\u78b3\u5316\u7845\u957f\u6676\u8bbe\u5907\u5df2\u4e8e2024\u5e747\u6708\u5728\u91cd\u5e86\u5b8c\u6210\u4ea4\u4ed8\u3002<\/p>\n

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10\u670828\u65e5\u665a\u95f4\uff0c\u62d3\u8346\u79d1\u6280\u53d1\u5e03\u4e862024\u5e74\u7b2c\u4e09\u5b63\u5ea6\u62a5\u544a\u3002\u62d3\u8346\u79d1\u6280Q3\u5b9e\u73b0\u8425\u653610.11\u4ebf\u5143\uff0c\u540c\u6bd4\u589e\u957f44.67%\uff1b\u5f52\u6bcd\u51c0\u5229\u6da61.42\u4ebf\u5143\uff0c\u540c\u6bd4\u4e0b\u6ed12.91%\uff1b\u5f52\u6bcd\u6263\u975e\u51c0\u5229\u6da60.46\u4ebf\u5143\uff0c\u540c\u6bd4\u4e0b\u6ed158.79%\u3002<\/p>\n

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\u4eca\u5e74\u4e0a\u534a\u5e74\uff0c\u62d3\u8346\u79d1\u6280\u8d85\u9ad8\u6df1\u5bbd\u6bd4\u6c9f\u69fd\u586b\u5145CVD\u8bbe\u5907\u3001PE-ALD SiN\u5de5\u827a\u8bbe\u5907\u3001HDPCVD FSG\u3001HDPCVD STI\u5de5\u827a\u8bbe\u5907\u7b49\u65b0\u4ea7\u54c1\u53ca\u65b0\u5de5\u827a\u5df2\u7ecf\u4e0b\u6e38\u7528\u6237\u9a8c\u8bc1\u5bfc\u5165\u3002<\/p>\n

\u5929\u5cb3\u5148\u8fdbQ3\u5b9e\u73b0\u8425\u65363.69\u4ebf\u5143\uff0c\u51c0\u5229\u540c\u6bd4\u589e\u957f982.08%<\/strong><\/p>\n

10\u670829\u65e5\u665a\u95f4\uff0c\u5929\u5cb3\u5148\u8fdb\u53d1\u5e03\u4e862024\u5e74\u7b2c\u4e09\u5b63\u5ea6\u62a5\u544a\u3002\u5929\u5cb3\u5148\u8fdbQ3\u5b9e\u73b0\u8425\u65363.69\u4ebf\u5143\uff0c\u540c\u6bd4\u4e0b\u6ed14.60%\uff1b\u5f52\u6bcd\u51c0\u5229\u6da60.41\u4ebf\u5143\uff0c\u540c\u6bd4\u589e\u957f982.08%\uff1b\u5f52\u6bcd\u6263\u975e\u51c0\u5229\u6da60.39\u4ebf\u5143\u3002<\/p>\n

\u5929\u5cb3\u5148\u8fdb\u8463\u4e8b\u957f\u5b97\u8273\u6c11\u7387\u56e2\u4e8e2024\u5e748\u670830\u65e5\u8bbf\u95ee\u4e86\u6d77\u4fe1\u96c6\u56e2\uff0c\u5176\u5bb6\u7535\u96c6\u56e2\u7814\u53d1\u6280\u672f\u8d1f\u8d23\u4eba\u4e0e\u6d77\u4fe1\u7a7a\u8c03\u4e8b\u4e1a\u90e8\u8d1f\u8d23\u4eba\u7b49\u5c31\u78b3\u5316\u7845\u534a\u5bfc\u4f53\u6750\u6599\u548c\u5668\u4ef6\u7684\u6280\u672f\u8fdb\u5c55\u65b9\u5411\uff0c\u4ee5\u53ca\u78b3\u5316\u7845\u529f\u7387\u5668\u4ef6\u5728\u767d\u8272\u5bb6\u7535\u4e0a\u7684\u5e94\u7528\u5c55\u5f00\u4e86\u4ea4\u6d41\u3002<\/p>\n

9\u67081\u65e5\uff0c\u5929\u5cb3\u5148\u8fdb\u5728\u5b98\u5fae\u5ba3\u5e03\u5c06\u4e0e\u6d77\u4fe1\u96c6\u56e2\u5c31\u78b3\u5316\u7845\u5728\u767d\u8272\u5bb6\u7535\u9886\u57df\u7684\u5e94\u7528\u5c55\u5f00\u4ea4\u6d41\uff0c\u610f\u5473\u7740\u53cc\u65b9\u672a\u6765\u5c06\u5171\u540c\u52a0\u5feb\u63a8\u52a8\u78b3\u5316\u7845\u6280\u672f\u5728\u767d\u8272\u5bb6\u7535\u9886\u57df\u7684\u5e94\u7528\u8fdb\u7a0b\u3002<\/p>\n

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10\u670829\u65e5\u665a\u95f4\uff0c\u65af\u8fbe\u534a\u5bfc\u4f53\u53d1\u5e03\u4e862024\u5e74\u7b2c\u4e09\u5b63\u5ea6\u62a5\u544a\u3002\u65af\u8fbe\u534a\u5bfc\u4f53Q3\u5b9e\u73b0\u8425\u65368.81\u4ebf\u5143\uff0c\u540c\u6bd4\u4e0b\u6ed15.30%\uff1b\u5f52\u6bcd\u51c0\u5229\u6da61.49\u4ebf\u5143\uff0c\u540c\u6bd4\u4e0b\u6ed134.91%\uff1b\u5f52\u6bcd\u6263\u975e\u51c0\u5229\u6da61.45\u4ebf\u5143\uff0c\u540c\u6bd4\u4e0b\u6ed133.95%\u3002<\/p>\n

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10\u670828\u65e5\u665a\u95f4\uff0c\u82af\u8054\u96c6\u6210\u53d1\u5e03\u4e862024\u5e74\u7b2c\u4e09\u5b63\u5ea6\u62a5\u544a\u3002\u82af\u8054\u96c6\u6210Q3\u5b9e\u73b0\u8425\u653616.68\u4ebf\u5143\uff0c\u540c\u6bd4\u589e\u957f27.16%\uff1b\u5f52\u6bcd\u51c0\u5229\u6da6-2.13\u4ebf\u5143\uff0c\u5f52\u6bcd\u6263\u975e\u51c0\u5229\u6da6-2.96\u4ebf\u5143\u3002<\/p>\n

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10\u670828\u65e5\u665a\u95f4\uff0c\u7eb3\u82af\u5fae\u53d1\u5e03\u4e862024\u5e74\u7b2c\u4e09\u5b63\u5ea6\u62a5\u544a\u3002\u7eb3\u82af\u5faeQ3\u5b9e\u73b0\u8425\u65365.17\u4ebf\u5143\uff0c\u540c\u6bd4\u589e\u957f86.59%\uff1b\u5f52\u6bcd\u51c0\u5229\u6da6-1.42\u4ebf\u5143\uff0c\u5f52\u6bcd\u6263\u975e\u51c0\u5229\u6da6-1.55\u4ebf\u5143\u3002<\/p>\n

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10\u670828\u65e5\u665a\u95f4\uff0c\u8d5b\u5fae\u7535\u5b50\u53d1\u5e03\u4e862024\u5e74\u7b2c\u4e09\u5b63\u5ea6\u62a5\u544a\u3002\u8d5b\u5fae\u7535\u5b50Q3\u5b9e\u73b0\u8425\u65362.74\u4ebf\u5143\uff0c\u540c\u6bd4\u4e0b\u6ed146.56%\uff1b\u5f52\u6bcd\u51c0\u5229\u6da6-0.75\u4ebf\u5143\uff0c\u5f52\u6bcd\u6263\u975e\u51c0\u5229\u6da6-0.79\u4ebf\u5143\u3002<\/p>\n

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