{"id":71193,"date":"2025-03-27T12:34:23","date_gmt":"2025-03-27T04:34:23","guid":{"rendered":"https:\/\/www.cnledw.com\/?p=71193"},"modified":"2025-03-27T12:34:53","modified_gmt":"2025-03-27T04:34:53","slug":"%e6%96%b0%e5%87%af%e6%9d%a5%e3%80%81%e7%94%b5%e7%a7%91%e8%a3%85%e5%a4%87%e3%80%81%e9%ab%98%e6%b5%8b%e8%82%a1%e4%bb%bd%e5%a4%a7%e5%8a%a8%e4%bd%9c%ef%bc%8c%e7%9e%84%e5%87%86%e7%ac%ac%e4%b8%89%e4%bb%a3","status":"publish","type":"post","link":"https:\/\/www.cnledw.com\/SiC\/newsdetail-71193.html","title":{"rendered":"\u65b0\u51ef\u6765\u3001\u7535\u79d1\u88c5\u5907\u3001\u9ad8\u6d4b\u80a1\u4efd\u5927\u52a8\u4f5c\uff0c\u7784\u51c6\u7b2c\u4e09\u4ee3\u534a\u5bfc\u4f53\u7b49\u53d1\u5c55"},"content":{"rendered":"
SEMICON China 2025\u6b63\u5982\u706b\u5982\u837c\u5728\u4e0a\u6d77\u53ec\u5f00\uff0c\u534a\u5bfc\u4f53\u8bbe\u5907\u53c2\u5c55\u5382\u5546\u6d3b\u8dc3\uff0c\u5438\u5f15\u89c2\u4f17\u9a7b\u8db3\u3002\u503c\u5f97\u4e00\u63d0\u7684\u662f\uff0c\u672c\u6b21\u5c55\u4f1a\u4e0a\uff0c\u56f4\u7ed5\u7b2c\u4e09\u4ee3\u534a\u5bfc\u4f53\u7b49\u9886\u57df\uff0c\u5305\u62ec\u65b0\u51ef\u6765\u3001\u7535\u79d1\u88c5\u5907\u3001\u9ad8\u6d4b\u80a1\u4efd\u7b49\u5728\u5185\u7684\u591a\u5bb6\u534a\u5bfc\u4f53\u8bbe\u5907\u5382\u5546\u62ff\u51fa\u4e86\u6700\u65b0\u4ea7\u54c1\u4e0e\u65b9\u6848\u3002<\/p>\n
SEMICON China 2025\u5c55\u4f1a\u671f\u95f4\uff0c\u56fd\u5185\u534a\u5bfc\u4f53\u8bbe\u5907\u65b0\u9510\u521b\u4f01\u65b0\u51ef\u6765\u201c\u9996\u79c0\u201d\uff0c\u5f15\u53d1\u73b0\u573a\u6781\u5927\u5173\u6ce8\u3002\u65b0\u51ef\u6765\u5c55\u51fa\u4e86\u5de5\u827a\u88c5\u5907\u3001\u91cf\u68c0\u6d4b\u88c5\u5907\u7b49\u5168\u7cfb\u5217\u4ea7\u54c1\uff0c\u5e76\u53d1\u5e03\u4e86\u4e94\u6b3e\u65b0\u54c1\uff0c\u6d89\u53ca\u5148\u8fdb\u5236\u7a0b\u3001\u7b2c\u4e09\u4ee3\u534a\u5bfc\u4f53\u7b49\u591a\u4e2a\u9886\u57df\u3002<\/p>\n
\u4e94\u6b3e\u65b0\u54c1\u5206\u522b\u662f\uff1a<\/p>\n
EPI\uff08\u5ce8\u7709\u5c71\uff09\uff1a\u4e13\u653b\u5148\u8fdb\u5236\u7a0b\u53ca\u7b2c\u4e09\u4ee3\u534a\u5bfc\u4f53\u3002
\nALD\uff08\u963f\u91cc\u5c71\uff09\uff1a\u652f\u63015nm\u53ca\u66f4\u5148\u8fdb\u5236\u7a0b\u3002
\nPVD\uff08\u666e\u9640\u5c71\uff09\uff1a\u91d1\u5c5e\u9540\u819c\u7cbe\u5ea6\u5fae\u7c73\u7ea7\uff0c\u5df2\u8fdb\u5165\u56fd\u5185\u6676\u5706\u4ee3\u5de5\u5927\u5382\u9a8c\u8bc1\u9636\u6bb5\u3002
\nETCH\uff08\u6b66\u5937\u5c71\uff09\uff1a\u805a\u7126\u7b2c\u4e09\u4ee3\u534a\u5bfc\u4f53\u523b\u8680\u3002
\nCVD\uff08\u957f\u767d\u5c71\uff09\uff1a\u9002\u914d5nm\uff0c\u517c\u5bb9\u591a\u79cd\u5236\u7a0b\u8282\u70b9\u3002<\/p>\n
\u636e\u6089\uff0cEPI\u5916\u5ef6\u5c42\u662f\u534a\u5bfc\u4f53\u5236\u9020\u4e2d\u7684\u91cd\u8981\u6280\u672f\uff0c\u5c24\u5176\u662f\u5728\u5148\u8fdb\u5236\u7a0b\u548c\u7b2c\u4e09\u4ee3\u534a\u5bfc\u4f53\u9886\u57df\u3002ETCH\u8680\u523b\u662f\u534a\u5bfc\u4f53\u5236\u9020\u5de5\u827a\uff0c\u5fae\u7535\u5b50IC\u5236\u9020\u5de5\u827a\u4ee5\u53ca\u5fae\u7eb3\u5236\u9020\u5de5\u827a\u4e2d\u7684\u4e00\u9053\u76f8\u5f53\u91cd\u8981\u7684\u6b65\u9aa4\uff0c\u662f\u4e0e\u5149\u523b\u76f8\u8054\u7cfb\u7684\u56fe\u5f62\u5316\uff08pattern\uff09\u5904\u7406\u7684\u4e00\u79cd\u4e3b\u8981\u5de5\u827a\uff0c\u76ee\u524d\u4e3b\u8981\u7531\u56fd\u9645\u5de8\u5934\u4e3b\u5bfc\uff1bCVD\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u662f\u534a\u5bfc\u4f53\u5236\u9020\u4e2d\u9700\u6c42\u91cf\u6700\u5927\u7684\u8bbe\u5907\u4e4b\u4e00\uff0cPVD\u7269\u7406\u6c14\u76f8\u6c89\u79ef\u3001ALD\u539f\u5b50\u5c42\u6c89\u79ef\u7b49\u90fd\u662f\u534a\u5bfc\u4f53\u5236\u9020\u5de5\u827a\u5f53\u4e2d\u975e\u5e38\u91cd\u8981\u7684\u9ad8\u7aef\u8bbe\u5907\u3002<\/p>\n
\u8d44\u6599\u663e\u793a\uff0c\u65b0\u51ef\u6765\u81f4\u529b\u4e8e\u534a\u5bfc\u4f53\u88c5\u5907\u53ca\u96f6\u90e8\u4ef6\u3001\u7535\u5b50\u5236\u9020\u8bbe\u5907\u7684\u7814\u53d1\u3001\u5236\u9020\u3001\u9500\u552e\u4e0e\u670d\u52a1\uff0c\u8be5\u516c\u53f8\u6838\u5fc3\u56e2\u961f\u5177\u590720\u5e74\u4ee5\u4e0a\u7535\u5b50\u8bbe\u5907\u6280\u672f\u5f00\u53d1\u7ecf\u9a8c\u3002\u8fd1\u5e74\uff0c\u65b0\u51ef\u6765\u5b8c\u6210\u4e86\u5168\u7cfb\u5217\u88c5\u5907\u5f00\u53d1\uff0c\u521d\u6b65\u6ee1\u8db3\u903b\u8f91\u3001\u5b58\u50a8\u7b49\u534a\u5bfc\u4f53\u5236\u9020\u4f01\u4e1a\u7684\u9700\u6c42\u3002\u622a\u81f32024\u5e74\u5e95\uff0c\u5927\u90e8\u5206\u88c5\u5907\u5df2\u7ecf\u53d6\u5f97\u7a81\u7834\uff0c\u5f00\u59cb\u9a8c\u8bc1\u548c\u5e94\u7528\u3002<\/p>\n
SEMICON China 2025\u671f\u95f4\uff0c\u5a92\u4f53\u805a\u7126\u7535\u79d1\u88c5\u5907\u6700\u65b0\u53d1\u5e03\u7684\u5927\u5c3a\u5bf8\u78b3\u5316\u7845\u6750\u6599\u52a0\u5de5\u667a\u80fd\u89e3\u51b3\u65b9\u6848\u8fdb\u884c\u62a5\u9053\u3002<\/p>\n
\u7535\u79d1\u88c5\u5907\u7ecf\u8fc7\u591a\u5e74\u53d1\u5c55\uff0c\u7535\u79d1\u88c5\u5907\u57f9\u80b2\u4e86\u6676\u952d\u51cf\u8584\u8bbe\u5907\u3001\u6fc0\u5149\u5265\u79bb\u8bbe\u5907\u3001\u6676\u7247\u51cf\u8584\u8bbe\u5907\u3001\u5316\u5b66\u673a\u68b0\u629b\u5149\u8bbe\u5907\u7b49\u660e\u661f\u4ea7\u54c1\uff0c\u5f62\u62108\u81f312\u82f1\u5bf8\u78b3\u5316\u7845\u6750\u6599\u52a0\u5de5\u667a\u80fd\u89e3\u51b3\u65b9\u6848\u3002<\/p>\n
\u62a5\u9053\u6307\u51fa\uff0c\u8be5\u516c\u53f8\u6700\u65b0\u53d1\u5e03\u7684\u5927\u5c3a\u5bf8\u78b3\u5316\u7845\u6750\u6599\u52a0\u5de5\u667a\u80fd\u89e3\u51b3\u65b9\u6848\u91c7\u7528\u6700\u65b0\u6fc0\u5149\u5265\u79bb\u5de5\u827a\u8fdb\u884c\u6676\u4f53\u5207\u7247\uff0c\u76f8\u8f83\u4e8e\u4f20\u7edf\u52a0\u5de5\u4ea7\u7ebf\u91c7\u7528\u7684\u591a\u7ebf\u5207\u5272\u6676\u4f53\u5207\u7247\u6280\u672f\uff0c\u6fc0\u5149\u5265\u79bb\u8bbe\u5907\u53ef\u4ee5\u4f7f\u6fc0\u5149\u805a\u7126\u5728\u78b3\u5316\u7845\u6676\u4f53\u5185\u90e8\u8bf1\u5bfc\u4ea7\u751f\u4e00\u5c42\u88c2\u7eb9\uff0c\u4ece\u800c\u907f\u514d\u4e86\u4f20\u7edf\u591a\u7ebf\u5207\u5272\u9020\u6210\u7684\u5207\u5272\u7ebf\u635f\uff0c\u5e73\u5747\u6bcf\u7247\u5207\u5272\u7814\u78e8\u635f\u8017\u4ec5\u4e3a\u539f\u6765\u768440%\u5de6\u53f3\uff0c\u663e\u8457\u964d\u4f4e\u52a0\u5de5\u6210\u672c\u3002<\/p>\n
\u76ee\u524d\u8be5\u89e3\u51b3\u65b9\u6848\u5df2\u83b7\u5f97\u5e02\u573a\u79ef\u6781\u53cd\u9988\uff0c\u8fdb\u5165\u7528\u6237\u4ea7\u7ebf\u5f00\u5c55\u8bd5\u9a8c\u9a8c\u8bc1\uff0c\u5e76\u4e0e\u591a\u5bb6\u5934\u90e8\u4f01\u4e1a\u8fbe\u6210\u610f\u5411\u5408\u4f5c\u3002<\/p>\n
\u9ad8\u6d4b\u80a1\u4efd\u9996\u6b21\u4eae\u76f8\u8be5\u5c55\u4f1a\uff0c\u5e26\u6765\u4e86\u516c\u53f8\u805a\u7126\u6676\u5706\u52a0\u5de5\u5236\u9020\u73af\u8282\uff0c\u5168\u9762\u8fed\u4ee3\u5e03\u5c40\u76848\u82f1\u5bf8\u78b3\u5316\u7845\u201c\u5207\u3001\u5012\u3001\u78e8\u201d\u4e00\u4f53\u5316\u89e3\u51b3\u65b9\u6848\u3002<\/p>\n
\u5728\u5207\u5272\u73af\u8282\uff0c\u9ad8\u6d4b\u80a1\u4efd2018\u5e74\u30012021\u5e74\uff0c\u5148\u540e\u63a8\u51fa\u9488\u5bf9\u534a\u5bfc\u4f53\u7845\u3001\u78b3\u5316\u7845\u5207\u5272\u7684\u91d1\u521a\u7ebf\u5207\u7247\u4e13\u673a\uff0c\u901a\u8fc7\u6301\u7eed\u4f18\u5316\u5207\u5272\u5de5\u827a\u548c\u53c2\u6570\uff0c\u80fd\u591f\u5b9e\u73b0\u5bf9\u4e0d\u540c\u5c3a\u5bf8\u3001\u4e0d\u540c\u6750\u8d28\u6676\u5706\u7684\u9ad8\u7cbe\u5ea6\u5207\u5272\uff0c\u4e0d\u65ad\u63d0\u5347\u7ebf\u5207\u7684\u5207\u5272\u6548\u7387\u3001\u5207\u7247\u8d28\u91cf\uff0c\u964d\u4f4e\u6750\u6599\u635f\u8017\u3002<\/p>\n
\u5728\u5012\u89d2\u73af\u8282\uff0c\u9ad8\u6d4b\u80a1\u4efd2024\u5e74\u63a8\u51fa\u5168\u81ea\u52a8\u6676\u5706\u5012\u89d2\u673a\uff0c\u91c7\u7528\u72ec\u7279\u7684\u53cc\u5de5\u4f4d\u72ec\u7acb\u7814\u78e8\u8bbe\u8ba1\uff0c\u9002\u7528\u4e8e4\u5bf8\u30016\u5bf8\u30018\u5bf8\u534a\u5bfc\u4f53\u6676\u5706\u6750\u6599\u7684\u8fb9\u7f18\u5012\u89d2\u52a0\u5de5\u3002<\/p>\n source\uff1a\u9ad8\u6d4b\u80a1\u4efd<\/span><\/p>\n \u5728\u7814\u78e8\u73af\u8282\uff0c\u9ad8\u6d4b\u80a1\u4efd\u5168\u81ea\u52a8\u51cf\u8584\u673a\u91c7\u7528In-feed\u52a0\u5de5\u539f\u7406\uff0c\u901a\u8fc7\u7802\u8f6e\u65cb\u8f6c\u53ca\u5782\u76f4\u8fdb\u7ed9\u5bf9\u65cb\u8f6c\u7684\u6676\u5706\u8fdb\u884c\u78e8\u524a\u52a0\u5de5\uff0c\u5b9e\u73b0\u9ad8\u7cbe\u5ea6\u3001\u9ad8\u521a\u6027\u3001\u9ad8\u7a33\u5b9a\u6027\u3001\u9ad8\u6548\u52a0\u5de5\u80fd\u529b\u3001\u4f4e\u635f\u4f24\u52a0\u5de5\uff0c\u5168\u9762\u517c\u5bb96-8\u82f1\u5bf8\u6676\u5706\u78e8\u524a\u52a0\u5de5\uff0c\u8868\u9762\u7c97\u7cd9\u5ea6\u63a7\u5236\u57283nm\u4ee5\u4e0b\uff0c\u6ee1\u8db3\u9ad8\u7aef\u82af\u7247\u5236\u9020\u5bf9\u6676\u5706\u8868\u9762\u8d28\u91cf\u7684\u4e25\u683c\u6807\u51c6\u3002<\/p>\n \u5728\u7b2c\u4e09\u4ee3\u534a\u5bfc\u4f53\u6750\u6599\u52a0\u5de5\u9700\u6c42\u6fc0\u589e\u7684\u80cc\u666f\u4e0b\uff0c\u9488\u5bf9\u5e02\u573a\u5bf9\u5de5\u827a\u6574\u5408\u4e0e\u6548\u7387\u63d0\u5347\u6108\u53d1\u8feb\u5207\u7684\u8bc9\u6c42\uff0c\u9ad8\u6d4b\u80a1\u4efd\u201c\u5207\u3001\u5012\u3001\u78e8\u201d\u4e00\u4f53\u5316\u65b9\u6848\u5168\u6d41\u7a0b\u7d27\u5bc6\u8854\u63a5\uff0c\u4ece\u5207\u5272\u8bbe\u5907\u7684\u9ad8\u6548\u5207\u5272\uff0c\u5230\u5012\u89d2\u8bbe\u5907\u5bf9\u6676\u5706\u8fb9\u7f18\u7684\u7cbe\u7ec6\u5904\u7406\uff0c\u518d\u5230\u51cf\u8584\u8bbe\u5907\u5bf9\u6676\u5706\u8868\u9762\u7684\u6253\u78e8\u629b\u5149\uff0c\u5b9e\u73b0\u4e86\u4ece\u539f\u6750\u6599\u5230\u6210\u54c1\u7684\u4e00\u7ad9\u5f0f\u52a0\u5de5\u3002\uff08\u96c6\u90a6\u5316\u5408\u7269\u534a\u5bfc\u4f53 \u5949\u9896\u5a34 \u6574\u7406\uff09<\/p>\n \u66f4\u591aSiC\u548cGaN\u7684\u5e02\u573a\u8d44\u8baf\uff0c\u8bf7\u5173\u6ce8\u5fae\u4fe1\u516c\u4f17\u8d26\u53f7\uff1a\u96c6\u90a6\u5316\u5408\u7269\u534a\u5bfc\u4f53\u3002<\/strong><\/p>\n","protected":false},"excerpt":{"rendered":" SEMICON China 2025\u6b63\u5982\u706b\u5982\u837c\u5728\u4e0a\u6d77\u53ec\u5f00\uff0c\u534a\u5bfc\u4f53\u8bbe\u5907\u53c2\u5c55\u5382\u5546\u6d3b\u8dc3\uff0c\u5438\u5f15\u89c2\u4f17\u9a7b\u8db3\u3002\u503c\u5f97\u4e00\u63d0\u7684\u662f\uff0c […]<\/p>\n","protected":false},"author":131,"featured_media":71194,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[1265,873,872],"tags":[697],"_links":{"self":[{"href":"https:\/\/www.cnledw.com\/wp-json\/wp\/v2\/posts\/71193"}],"collection":[{"href":"https:\/\/www.cnledw.com\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.cnledw.com\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.cnledw.com\/wp-json\/wp\/v2\/users\/131"}],"replies":[{"embeddable":true,"href":"https:\/\/www.cnledw.com\/wp-json\/wp\/v2\/comments?post=71193"}],"version-history":[{"count":4,"href":"https:\/\/www.cnledw.com\/wp-json\/wp\/v2\/posts\/71193\/revisions"}],"predecessor-version":[{"id":71210,"href":"https:\/\/www.cnledw.com\/wp-json\/wp\/v2\/posts\/71193\/revisions\/71210"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.cnledw.com\/wp-json\/wp\/v2\/media\/71194"}],"wp:attachment":[{"href":"https:\/\/www.cnledw.com\/wp-json\/wp\/v2\/media?parent=71193"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.cnledw.com\/wp-json\/wp\/v2\/categories?post=71193"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.cnledw.com\/wp-json\/wp\/v2\/tags?post=71193"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}